TY - JOUR
T1 - Transport properties and electronic structure of fluorine-doped SnO2 prepared by ultrasonic assisted mist deposition
AU - Sakai, Enju
AU - Tsutsumi, Naoya
AU - Horiba, Koji
AU - Kumigashira, Hiroshi
AU - Tsuji, Yoshiko
N1 - Funding Information:
The work at KEK-PF was performed under the approval of the Program Advisory Committee (Proposal no. 2017G609) at the Institute of Materials Structure Science, KEK. The authors are very grateful to T. Fujii for his help in transport measurements.
PY - 2021/2
Y1 - 2021/2
N2 - We have investigated the relationship between the transport properties and electronic states of fluorine-doped tin dioxide (FTO) films prepared by ultrasonic assisted mist deposition. The resistivity of the films has the minimum against F/Sn ratios caused by the saturation of carrier concentration. The core-level and valence band PES spectra revealed that there were fluorine ions with two different chemical states and excess fluorine ions tended to form impurity states in band gap, which would not contribute to the conduction of the films. These spectroscopic results well explain the saturated tendency of the carrier concentration of the FTO films.
AB - We have investigated the relationship between the transport properties and electronic states of fluorine-doped tin dioxide (FTO) films prepared by ultrasonic assisted mist deposition. The resistivity of the films has the minimum against F/Sn ratios caused by the saturation of carrier concentration. The core-level and valence band PES spectra revealed that there were fluorine ions with two different chemical states and excess fluorine ions tended to form impurity states in band gap, which would not contribute to the conduction of the films. These spectroscopic results well explain the saturated tendency of the carrier concentration of the FTO films.
KW - Transparent conductive oxides
KW - Ultrasonic mist deposition
KW - XAS
KW - XPS
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U2 - 10.1016/j.elspec.2020.147041
DO - 10.1016/j.elspec.2020.147041
M3 - Article
AN - SCOPUS:85099531361
VL - 247
JO - Journal of Electron Spectroscopy and Related Phenomena
JF - Journal of Electron Spectroscopy and Related Phenomena
SN - 0368-2048
M1 - 147041
ER -