Transparent conducting properties of Re-doped β -MoO3 films

Kuniko Yamamoto, Ryota Shimizu, Susumu Shiraki, Taro Hitosugi

    Research output: Contribution to journalArticlepeer-review

    6 Citations (Scopus)


    We report the significant increase in the electrical conductivity, by five orders of magnitude, of Re-doped β-MoO3 epitaxial films grown using reactive DC magnetron sputtering. Re atoms were successfully incorporated into the films by using Mo-Re alloy targets, although the film compositions deviated significantly from those of the targets. Pristine β-MoO3 exhibited a conductivity below 10-7 S/cm, whereas β-Mo0.982Re0.018O3 exhibited a conductivity of 1.2 × 10-2 S/cm and a high optical transmittance of 67% (average) in the visible region. Furthermore, transparent conducting properties were reproduced in a polycrystalline film grown on a glass substrate, indicating the high potential of these films for use as transparent conductors.

    Original languageEnglish
    Article number096104
    JournalAPL Materials
    Issue number9
    Publication statusPublished - 2016 Sep 1

    ASJC Scopus subject areas

    • Materials Science(all)
    • Engineering(all)


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