Transparent anatase and rutile TiO2 films grown by laser chemical vapor deposition

Akihiko Ito, Takahiro Sato, Takashi Goto

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


Transparent single-crystal TiO2 films were grown on (001) SrTiO3 substrate by laser chemical vapor deposition. (001) anatase, (101) anatase, and (110) rutile TiO2 films were epitaxially grown at 1230, 1448, and 1500 K, respectively. The in-plane epitaxial orientation relations were [100] anatase TiO2//[100] SrTiO3 in the (001) anatase TiO2//(001) SrTiO3 film, [010] anatase TiO2//[100] SrTiO3 in the (101) anatase TiO 2//(001) SrTiO3 film, and [001] rutile TiO 2//[100] SrTiO3 in the (110) rutile//(001) SrTiO 3 film. The TiO2 films were highly transparent at the visible to near-infrared range. A high transmittance of 98% was observed for the (001) anatase TiO2 film at a wavelength of 800 nm.

Original languageEnglish
Pages (from-to)37-41
Number of pages5
JournalThin Solid Films
Publication statusPublished - 2014 Jan 31


  • Epitaxial growth
  • Laser-assisted chemical vapor deposition
  • Titanium dioxide
  • Transparent films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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