Transparent anatase and rutile TiO2 films grown by laser chemical vapor deposition

Akihiko Ito; Takahiro Sato; Takashi Goto

doi:10.1016/j.tsf.2013.11.089

Transparent anatase and rutile TiO₂ films grown by laser chemical vapor deposition

Akihiko Ito, Takahiro Sato, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

Transparent single-crystal TiO₂ films were grown on (001) SrTiO₃ substrate by laser chemical vapor deposition. (001) anatase, (101) anatase, and (110) rutile TiO₂ films were epitaxially grown at 1230, 1448, and 1500 K, respectively. The in-plane epitaxial orientation relations were [100] anatase TiO₂//[100] SrTiO₃ in the (001) anatase TiO₂//(001) SrTiO₃ film, [010] anatase TiO₂//[100] SrTiO₃ in the (101) anatase TiO ₂//(001) SrTiO₃ film, and [001] rutile TiO ₂//[100] SrTiO₃ in the (110) rutile//(001) SrTiO ₃ film. The TiO₂ films were highly transparent at the visible to near-infrared range. A high transmittance of 98% was observed for the (001) anatase TiO₂ film at a wavelength of 800 nm.

Original language	English
Pages (from-to)	37-41
Number of pages	5
Journal	Thin Solid Films
Volume	551
DOIs	https://doi.org/10.1016/j.tsf.2013.11.089
Publication status	Published - 2014 Jan 31

Keywords

Epitaxial growth
Laser-assisted chemical vapor deposition
Titanium dioxide
Transparent films

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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title = "Transparent anatase and rutile TiO2 films grown by laser chemical vapor deposition",

abstract = "Transparent single-crystal TiO2 films were grown on (001) SrTiO3 substrate by laser chemical vapor deposition. (001) anatase, (101) anatase, and (110) rutile TiO2 films were epitaxially grown at 1230, 1448, and 1500 K, respectively. The in-plane epitaxial orientation relations were [100] anatase TiO2//[100] SrTiO3 in the (001) anatase TiO2//(001) SrTiO3 film, [010] anatase TiO2//[100] SrTiO3 in the (101) anatase TiO 2//(001) SrTiO3 film, and [001] rutile TiO 2//[100] SrTiO3 in the (110) rutile//(001) SrTiO 3 film. The TiO2 films were highly transparent at the visible to near-infrared range. A high transmittance of 98% was observed for the (001) anatase TiO2 film at a wavelength of 800 nm.",

keywords = "Epitaxial growth, Laser-assisted chemical vapor deposition, Titanium dioxide, Transparent films",

author = "Akihiko Ito and Takahiro Sato and Takashi Goto",

note = "Funding Information: This research was supported in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (A) ( 25709069 ) and Challenging Exploratory Research ( 25630273 ), and the 111 project, China ( B13035 ). This research was also supported in part by a cooperative program of the ARCMG-IMR, Tohoku University .",

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doi = "10.1016/j.tsf.2013.11.089",

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T1 - Transparent anatase and rutile TiO2 films grown by laser chemical vapor deposition

AU - Ito, Akihiko

AU - Sato, Takahiro

AU - Goto, Takashi

N1 - Funding Information: This research was supported in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (A) ( 25709069 ) and Challenging Exploratory Research ( 25630273 ), and the 111 project, China ( B13035 ). This research was also supported in part by a cooperative program of the ARCMG-IMR, Tohoku University .

PY - 2014/1/31

Y1 - 2014/1/31

N2 - Transparent single-crystal TiO2 films were grown on (001) SrTiO3 substrate by laser chemical vapor deposition. (001) anatase, (101) anatase, and (110) rutile TiO2 films were epitaxially grown at 1230, 1448, and 1500 K, respectively. The in-plane epitaxial orientation relations were [100] anatase TiO2//[100] SrTiO3 in the (001) anatase TiO2//(001) SrTiO3 film, [010] anatase TiO2//[100] SrTiO3 in the (101) anatase TiO 2//(001) SrTiO3 film, and [001] rutile TiO 2//[100] SrTiO3 in the (110) rutile//(001) SrTiO 3 film. The TiO2 films were highly transparent at the visible to near-infrared range. A high transmittance of 98% was observed for the (001) anatase TiO2 film at a wavelength of 800 nm.

AB - Transparent single-crystal TiO2 films were grown on (001) SrTiO3 substrate by laser chemical vapor deposition. (001) anatase, (101) anatase, and (110) rutile TiO2 films were epitaxially grown at 1230, 1448, and 1500 K, respectively. The in-plane epitaxial orientation relations were [100] anatase TiO2//[100] SrTiO3 in the (001) anatase TiO2//(001) SrTiO3 film, [010] anatase TiO2//[100] SrTiO3 in the (101) anatase TiO 2//(001) SrTiO3 film, and [001] rutile TiO 2//[100] SrTiO3 in the (110) rutile//(001) SrTiO 3 film. The TiO2 films were highly transparent at the visible to near-infrared range. A high transmittance of 98% was observed for the (001) anatase TiO2 film at a wavelength of 800 nm.

KW - Epitaxial growth

KW - Laser-assisted chemical vapor deposition

KW - Titanium dioxide

KW - Transparent films

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