TY - JOUR
T1 - Transparent anatase and rutile TiO2 films grown by laser chemical vapor deposition
AU - Ito, Akihiko
AU - Sato, Takahiro
AU - Goto, Takashi
N1 - Funding Information:
This research was supported in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (A) ( 25709069 ) and Challenging Exploratory Research ( 25630273 ), and the 111 project, China ( B13035 ). This research was also supported in part by a cooperative program of the ARCMG-IMR, Tohoku University .
PY - 2014/1/31
Y1 - 2014/1/31
N2 - Transparent single-crystal TiO2 films were grown on (001) SrTiO3 substrate by laser chemical vapor deposition. (001) anatase, (101) anatase, and (110) rutile TiO2 films were epitaxially grown at 1230, 1448, and 1500 K, respectively. The in-plane epitaxial orientation relations were [100] anatase TiO2//[100] SrTiO3 in the (001) anatase TiO2//(001) SrTiO3 film, [010] anatase TiO2//[100] SrTiO3 in the (101) anatase TiO 2//(001) SrTiO3 film, and [001] rutile TiO 2//[100] SrTiO3 in the (110) rutile//(001) SrTiO 3 film. The TiO2 films were highly transparent at the visible to near-infrared range. A high transmittance of 98% was observed for the (001) anatase TiO2 film at a wavelength of 800 nm.
AB - Transparent single-crystal TiO2 films were grown on (001) SrTiO3 substrate by laser chemical vapor deposition. (001) anatase, (101) anatase, and (110) rutile TiO2 films were epitaxially grown at 1230, 1448, and 1500 K, respectively. The in-plane epitaxial orientation relations were [100] anatase TiO2//[100] SrTiO3 in the (001) anatase TiO2//(001) SrTiO3 film, [010] anatase TiO2//[100] SrTiO3 in the (101) anatase TiO 2//(001) SrTiO3 film, and [001] rutile TiO 2//[100] SrTiO3 in the (110) rutile//(001) SrTiO 3 film. The TiO2 films were highly transparent at the visible to near-infrared range. A high transmittance of 98% was observed for the (001) anatase TiO2 film at a wavelength of 800 nm.
KW - Epitaxial growth
KW - Laser-assisted chemical vapor deposition
KW - Titanium dioxide
KW - Transparent films
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U2 - 10.1016/j.tsf.2013.11.089
DO - 10.1016/j.tsf.2013.11.089
M3 - Article
AN - SCOPUS:84891744693
VL - 551
SP - 37
EP - 41
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
ER -