Transmission type position sensor made on thin Si film

Sasaki Minoru, Takebe Hitoshi, Hane Kazuhiro

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)538-539
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume118
Issue number11
DOIs
Publication statusPublished - 1998 Jan 1

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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