TRANSMISSION GRATING INCORPORATED DISPLACEMENT SENSOR: A CRITICAL STUDY OF THE SENSOR PARAMETERS.

K. Hane, C. P. Grover

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Presented is a critical study of the parameters of a grating imaging system when it is used as a displacement sensor. The images of a periodic object placed upstream and in close vicinity of the pupil transmission grating are produced with an extremely high magnification. A study of the image contrast as a function of the periods of the object and pupil gratings, their size and the polychromaticity of the illuminating source has been made to ascertain the optimum sensor parameters. The sensitivity of displacement measurements has been estimated to be 0. 01 mu m over a measuring range of plus or minus 1 mu m around the zero level.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Pages307-314
Number of pages8
ISBN (Print)0892526963, 9780892526963
DOIs
Publication statusPublished - 1986
Externally publishedYes

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume661
ISSN (Print)0277-786X

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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