Transmission electron microscopy study on microstructure of tungsten/carbon multilayer films

Tetsuya Oshino, Daisuke Shindo, Makoto Hirabayashi, Eiji Aoyagi, Hideo Nikaido

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Microstructure changes of tungsten/carbon (W/C) multilayer films with heat treatments were investigated by high-resolution transmission electron microscopy (HRTEM) and X-ray diffraction. When the W/C amorphous multilayer films were annealed in vacuum at 800 or 900ºC, the X-ray reflectivity became 30% higher than that of as-prepared ones in association with a slight increase of the periodic spacing of the multilayers. HRTEM images of the annealed specimens revealed the existence of randomly distributed microcrystallites of W2C in the W layers. The increase of X-ray reflectivity was interpreted well with a simple structural model assuming the decrease of the C-atom-number density in the C layers.

Original languageEnglish
Pages (from-to)1909-1914
Number of pages6
JournalJapanese journal of applied physics
Volume28
Issue number10 R
DOIs
Publication statusPublished - 1989 Oct

Keywords

  • Annealing effect
  • Transmission electron microscopy
  • W/C multilayer film
  • W2C
  • X-ray reflectivity

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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