TY - JOUR
T1 - Transmission electron microscopy study on FeSi2 nanoparticles synthesized by electron-beam evaporation
AU - Won, Jong Han
AU - Sato, Kazuhisa
AU - Ishimaru, Manabu
AU - Hirotsu, Yoshihiko
N1 - Funding Information:
This research was partially supported by the 21st Century Center of Excellence program “Towards Creating New Industrials Based on Inter-Nanoscience” from the Ministry of Education, Culture, Sport, Science and Technology, Japan. One of the authors (M.I.) also acknowledges the financial support from the Hosokawa Powder Technology Foundation.
PY - 2006
Y1 - 2006
N2 - We have synthesized epitaxially grown iron disilicide (FeSi2) nanoparticles using an electron-beam evaporation technique and characterized them by transmission electron microscopy (TEM). An Fe film was deposited on a Si(100) substrate, followed by thermal annealing at 1073 K for 2 h. It was found that epitaxially grown nanoparticles with an average size of ∼ 10 nm were formed just beneath the Si surface, suggesting that the deposited Fe atoms diffuse into the substrate. Every single phase of nanoparticles was examined in detail by TEM observation, nanobeam electron diffraction, and energy-dispersive x-ray spectroscopy. Plan-view and cross-sectional TEM observations revealed that these nanoparticles consist of α-, α-, and γ-FeSi 2. It was found that the morphology of nanoparticles is closely related to the phases. The α and β phases consist of angled hemisphere and asymmetric triangle-shaped nanoparticles, respectively, while the γ phase consists of hemispherical or columnar-shaped nanoparticles. These particle morphologies are discussed with respect to the lattice mismatches between the particles and the matrix.
AB - We have synthesized epitaxially grown iron disilicide (FeSi2) nanoparticles using an electron-beam evaporation technique and characterized them by transmission electron microscopy (TEM). An Fe film was deposited on a Si(100) substrate, followed by thermal annealing at 1073 K for 2 h. It was found that epitaxially grown nanoparticles with an average size of ∼ 10 nm were formed just beneath the Si surface, suggesting that the deposited Fe atoms diffuse into the substrate. Every single phase of nanoparticles was examined in detail by TEM observation, nanobeam electron diffraction, and energy-dispersive x-ray spectroscopy. Plan-view and cross-sectional TEM observations revealed that these nanoparticles consist of α-, α-, and γ-FeSi 2. It was found that the morphology of nanoparticles is closely related to the phases. The α and β phases consist of angled hemisphere and asymmetric triangle-shaped nanoparticles, respectively, while the γ phase consists of hemispherical or columnar-shaped nanoparticles. These particle morphologies are discussed with respect to the lattice mismatches between the particles and the matrix.
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U2 - 10.1063/1.2209751
DO - 10.1063/1.2209751
M3 - Article
AN - SCOPUS:33746317791
VL - 100
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 1
M1 - 014307
ER -