Transmission electron microscopy of threading dislocations in ZnO films grown on sapphire

Sung Hwan Lim; Jack Washburn; Zuzanna Liliental-Weber; Daisuke Shindo

doi:10.1116/1.1397462

Transmission electron microscopy of threading dislocations in ZnO films grown on sapphire

Sung Hwan Lim, Jack Washburn, Zuzanna Liliental-Weber, Daisuke Shindo

Center for Advanced Microscopy and Spectroscopy

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

A study of threading dislocations in wurtzite ZnO films grown on a plane of sapphire was carried out. The threading dislocations were found to be of screw or mixed character, and dislocation half loops were observed. The half loops were supposed to be formed by annihilation of two screw dislocations with opposite polarity.

Original language	English
Pages (from-to)	2601-2603
Number of pages	3
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	19
Issue number	5
DOIs	https://doi.org/10.1116/1.1397462
Publication status	Published - 2001 Sep 1

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "A study of threading dislocations in wurtzite ZnO films grown on a plane of sapphire was carried out. The threading dislocations were found to be of screw or mixed character, and dislocation half loops were observed. The half loops were supposed to be formed by annihilation of two screw dislocations with opposite polarity.",

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