Transmission electron microscopy of threading dislocations in ZnO films grown on sapphire

Sung Hwan Lim, Jack Washburn, Zuzanna Liliental-Weber, Daisuke Shindo

    Research output: Contribution to journalArticlepeer-review

    27 Citations (Scopus)

    Abstract

    A study of threading dislocations in wurtzite ZnO films grown on a plane of sapphire was carried out. The threading dislocations were found to be of screw or mixed character, and dislocation half loops were observed. The half loops were supposed to be formed by annihilation of two screw dislocations with opposite polarity.

    Original languageEnglish
    Pages (from-to)2601-2603
    Number of pages3
    JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
    Volume19
    Issue number5
    DOIs
    Publication statusPublished - 2001 Sep

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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