A study of threading dislocations in wurtzite ZnO films grown on a plane of sapphire was carried out. The threading dislocations were found to be of screw or mixed character, and dislocation half loops were observed. The half loops were supposed to be formed by annihilation of two screw dislocations with opposite polarity.
|Number of pages||3|
|Journal||Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films|
|Publication status||Published - 2001 Sep 1|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films