TY - GEN
T1 - Transmission electron microscopy characterization of hydrothermal-treated aluminum film
AU - Qiu, Zhiyong
AU - Shimanuki, Junichi
AU - Hosoki, Yusuke
AU - Ishiguro, Takashi
PY - 2010/12/1
Y1 - 2010/12/1
N2 - In our previous study [J. Appl. Phys. 106, 023524 (2009)], it was confirmed that aluminum (Al) film was transformed into transparent film by hydrothermal-treating in ultrapure water. In addition, transmittance of this specimen became larger than that of the glass substrate itself. This is useful property for anti-reflective coating. In this study, transmission electron microscopy has been performed to observe structural change during boiling 100 nm-thick Al film. After boiling, the film expands 4 or 5 times in thickness. However, the structure is not homogeneous along surface normal of the substrate. There is density gradient structure corresponding to boehmite crystal growth from embryo to crystal sheet less than 10 nm thickness. This kind of structure is thought to be one of the structural reasons for low reflectance.
AB - In our previous study [J. Appl. Phys. 106, 023524 (2009)], it was confirmed that aluminum (Al) film was transformed into transparent film by hydrothermal-treating in ultrapure water. In addition, transmittance of this specimen became larger than that of the glass substrate itself. This is useful property for anti-reflective coating. In this study, transmission electron microscopy has been performed to observe structural change during boiling 100 nm-thick Al film. After boiling, the film expands 4 or 5 times in thickness. However, the structure is not homogeneous along surface normal of the substrate. There is density gradient structure corresponding to boehmite crystal growth from embryo to crystal sheet less than 10 nm thickness. This kind of structure is thought to be one of the structural reasons for low reflectance.
UR - http://www.scopus.com/inward/record.url?scp=79951970837&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79951970837&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:79951970837
SN - 9781617822124
T3 - Materials Research Society Symposium Proceedings
SP - 38
EP - 43
BT - Advanced Microscopy and Spectroscopy Techniques for Imaging Materials with High Spatial Resolution
T2 - 2009 MRS Fall Meeting
Y2 - 30 November 2009 through 4 December 2009
ER -