Transmission electron microscopy characterization of hydrothermal-treated aluminum film

Zhiyong Qiu, Junichi Shimanuki, Yusuke Hosoki, Takashi Ishiguro

    Research output: Chapter in Book/Report/Conference proceedingConference contribution


    In our previous study [J. Appl. Phys. 106, 023524 (2009)], it was confirmed that aluminum (Al) film was transformed into transparent film by hydrothermal-treating in ultrapure water. In addition, transmittance of this specimen became larger than that of the glass substrate itself. This is useful property for anti-reflective coating. In this study, transmission electron microscopy has been performed to observe structural change during boiling 100 nm-thick Al film. After boiling, the film expands 4 or 5 times in thickness. However, the structure is not homogeneous along surface normal of the substrate. There is density gradient structure corresponding to boehmite crystal growth from embryo to crystal sheet less than 10 nm thickness. This kind of structure is thought to be one of the structural reasons for low reflectance.

    Original languageEnglish
    Title of host publicationAdvanced Microscopy and Spectroscopy Techniques for Imaging Materials with High Spatial Resolution
    Number of pages6
    Publication statusPublished - 2010 Dec 1
    Event2009 MRS Fall Meeting - Boston, MA, United States
    Duration: 2009 Nov 302009 Dec 4

    Publication series

    NameMaterials Research Society Symposium Proceedings
    ISSN (Print)0272-9172


    Other2009 MRS Fall Meeting
    Country/TerritoryUnited States
    CityBoston, MA

    ASJC Scopus subject areas

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering


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