Transmission electron microscopy analysis of a threading dislocation with c + a burgers vector in 4H-SiC

Yoshihiro Sugawara; Michio Nakamori; Yong Zhao Yao; Yukari Ishikawa; Katsunori Danno; Hiroshi Suzuki; Takeshi Bessho; Satoshi Yamaguchi; Koichi Nishikawa; Yuichi Ikuhara

doi:10.1143/APEX.5.081301

Transmission electron microscopy analysis of a threading dislocation with c + a burgers vector in 4H-SiC

Yoshihiro Sugawara, Michio Nakamori, Yong Zhao Yao, Yukari Ishikawa, Katsunori Danno, Hiroshi Suzuki, Takeshi Bessho, Satoshi Yamaguchi, Koichi Nishikawa, Yuichi Ikuhara

Research output: Contribution to journal › Article › peer-review

33 Citations (Scopus)

Abstract

A threading dislocation (TD) in 4H-SiC, which was interpreted as a right-handed threading screw dislocation (TSD) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na ₂O ₂ additive (KN etching), was characterized by large-angle convergent-beam electron diffraction (LACBED) and weak-beam dark-field methods. It was found that this TD was a so-called c + a dislocation with Burgers vector of b = [0001] + (1/3)[2110], which is often misinterpreted as TSD (c-dislocation) by SMBXT and KN etching. The rotation direction of the screw component within the c + a TD determined by LACBED agreed with the SMBXT observation.

Original language	English
Article number	081301
Journal	Applied Physics Express
Volume	5
Issue number	8
DOIs	https://doi.org/10.1143/APEX.5.081301
Publication status	Published - 2012 Aug

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Transmission electron microscopy analysis of a threading dislocation with c + a burgers vector in 4H-SiC. / Sugawara, Yoshihiro; Nakamori, Michio; Yao, Yong Zhao; Ishikawa, Yukari; Danno, Katsunori; Suzuki, Hiroshi; Bessho, Takeshi; Yamaguchi, Satoshi; Nishikawa, Koichi; Ikuhara, Yuichi.

In: Applied Physics Express, Vol. 5, No. 8, 081301, 08.2012.

Research output: Contribution to journal › Article › peer-review

@article{f17ae4a331854f7aad9e58f9e9a809d4,

title = "Transmission electron microscopy analysis of a threading dislocation with c + a burgers vector in 4H-SiC",

abstract = "A threading dislocation (TD) in 4H-SiC, which was interpreted as a right-handed threading screw dislocation (TSD) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na 2O 2 additive (KN etching), was characterized by large-angle convergent-beam electron diffraction (LACBED) and weak-beam dark-field methods. It was found that this TD was a so-called c + a dislocation with Burgers vector of b = [0001] + (1/3)[2110], which is often misinterpreted as TSD (c-dislocation) by SMBXT and KN etching. The rotation direction of the screw component within the c + a TD determined by LACBED agreed with the SMBXT observation.",

author = "Yoshihiro Sugawara and Michio Nakamori and Yao, {Yong Zhao} and Yukari Ishikawa and Katsunori Danno and Hiroshi Suzuki and Takeshi Bessho and Satoshi Yamaguchi and Koichi Nishikawa and Yuichi Ikuhara",

year = "2012",

month = aug,

doi = "10.1143/APEX.5.081301",

language = "English",

volume = "5",

journal = "Applied Physics Express",

issn = "1882-0778",

publisher = "Japan Society of Applied Physics",

number = "8",

}

TY - JOUR

T1 - Transmission electron microscopy analysis of a threading dislocation with c + a burgers vector in 4H-SiC

AU - Sugawara, Yoshihiro

AU - Nakamori, Michio

AU - Yao, Yong Zhao

AU - Ishikawa, Yukari

AU - Danno, Katsunori

AU - Suzuki, Hiroshi

AU - Bessho, Takeshi

AU - Yamaguchi, Satoshi

AU - Nishikawa, Koichi

AU - Ikuhara, Yuichi

PY - 2012/8

Y1 - 2012/8

N2 - A threading dislocation (TD) in 4H-SiC, which was interpreted as a right-handed threading screw dislocation (TSD) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na 2O 2 additive (KN etching), was characterized by large-angle convergent-beam electron diffraction (LACBED) and weak-beam dark-field methods. It was found that this TD was a so-called c + a dislocation with Burgers vector of b = [0001] + (1/3)[2110], which is often misinterpreted as TSD (c-dislocation) by SMBXT and KN etching. The rotation direction of the screw component within the c + a TD determined by LACBED agreed with the SMBXT observation.

AB - A threading dislocation (TD) in 4H-SiC, which was interpreted as a right-handed threading screw dislocation (TSD) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na 2O 2 additive (KN etching), was characterized by large-angle convergent-beam electron diffraction (LACBED) and weak-beam dark-field methods. It was found that this TD was a so-called c + a dislocation with Burgers vector of b = [0001] + (1/3)[2110], which is often misinterpreted as TSD (c-dislocation) by SMBXT and KN etching. The rotation direction of the screw component within the c + a TD determined by LACBED agreed with the SMBXT observation.

UR - http://www.scopus.com/inward/record.url?scp=84865332776&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84865332776&partnerID=8YFLogxK

U2 - 10.1143/APEX.5.081301

DO - 10.1143/APEX.5.081301

M3 - Article

AN - SCOPUS:84865332776

VL - 5

JO - Applied Physics Express

JF - Applied Physics Express

SN - 1882-0778

IS - 8

M1 - 081301

ER -

Transmission electron microscopy analysis of a threading dislocation with c + a burgers vector in 4H-SiC

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