TY - JOUR
T1 - Transmission electron microscopy analysis of a threading dislocation with c + a burgers vector in 4H-SiC
AU - Sugawara, Yoshihiro
AU - Nakamori, Michio
AU - Yao, Yong Zhao
AU - Ishikawa, Yukari
AU - Danno, Katsunori
AU - Suzuki, Hiroshi
AU - Bessho, Takeshi
AU - Yamaguchi, Satoshi
AU - Nishikawa, Koichi
AU - Ikuhara, Yuichi
PY - 2012/8
Y1 - 2012/8
N2 - A threading dislocation (TD) in 4H-SiC, which was interpreted as a right-handed threading screw dislocation (TSD) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na 2O 2 additive (KN etching), was characterized by large-angle convergent-beam electron diffraction (LACBED) and weak-beam dark-field methods. It was found that this TD was a so-called c + a dislocation with Burgers vector of b = [0001] + (1/3)[2110], which is often misinterpreted as TSD (c-dislocation) by SMBXT and KN etching. The rotation direction of the screw component within the c + a TD determined by LACBED agreed with the SMBXT observation.
AB - A threading dislocation (TD) in 4H-SiC, which was interpreted as a right-handed threading screw dislocation (TSD) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na 2O 2 additive (KN etching), was characterized by large-angle convergent-beam electron diffraction (LACBED) and weak-beam dark-field methods. It was found that this TD was a so-called c + a dislocation with Burgers vector of b = [0001] + (1/3)[2110], which is often misinterpreted as TSD (c-dislocation) by SMBXT and KN etching. The rotation direction of the screw component within the c + a TD determined by LACBED agreed with the SMBXT observation.
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U2 - 10.1143/APEX.5.081301
DO - 10.1143/APEX.5.081301
M3 - Article
AN - SCOPUS:84865332776
VL - 5
JO - Applied Physics Express
JF - Applied Physics Express
SN - 1882-0778
IS - 8
M1 - 081301
ER -