Transmission electron microscopy analysis of a threading dislocation with c + a burgers vector in 4H-SiC

Yoshihiro Sugawara, Michio Nakamori, Yong Zhao Yao, Yukari Ishikawa, Katsunori Danno, Hiroshi Suzuki, Takeshi Bessho, Satoshi Yamaguchi, Koichi Nishikawa, Yuichi Ikuhara

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    33 Citations (Scopus)

    Abstract

    A threading dislocation (TD) in 4H-SiC, which was interpreted as a right-handed threading screw dislocation (TSD) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na 2O 2 additive (KN etching), was characterized by large-angle convergent-beam electron diffraction (LACBED) and weak-beam dark-field methods. It was found that this TD was a so-called c + a dislocation with Burgers vector of b = [0001] + (1/3)[2110], which is often misinterpreted as TSD (c-dislocation) by SMBXT and KN etching. The rotation direction of the screw component within the c + a TD determined by LACBED agreed with the SMBXT observation.

    Original languageEnglish
    Article number081301
    JournalApplied Physics Express
    Volume5
    Issue number8
    DOIs
    Publication statusPublished - 2012 Aug

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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