We present a new trench type cell, transistor on capacitor (TOC) cell with 1/4 pitch layout. Two kinds of new idea have been implemented. One is that the density of the trench capacitor is closest packed by introducing 1/4 pitch layout. The other is that the transfer transistor is fabricated over the trench capacitor by introducing the newly developed epitaxial growth and Chemical Mechanical Polish (CMP) technologies. As a result, trench opening can be enlarged without reducing the gate length of the transfer transistor.
|Number of pages||2|
|Journal||Digest of Technical Papers - Symposium on VLSI Technology|
|Publication status||Published - 2000|
|Event||2000 Symposium on VLSI Technology - Honolulu, HI, USA|
Duration: 2000 Jun 13 → 2000 Jun 15
ASJC Scopus subject areas
- Electrical and Electronic Engineering