Transient response in monolithic mach-zehnder optical modulator using (Ba,Sr)TiO3 film sputtered at low temperature on silicon

Masato Suzuki, Kazuma Nagata, Yuichiro Tanushi, Shin Yokoyama

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

We have fabricated Mach-Zhender interferometers (MZIs) using the (Ba,Sr)TiO3 (BST) film sputter-deposited at 450°C, which is a critical temperature for the process after metallization. An optical modulation of about 10% is achieved when 200 V is applied (electric field in BST is 1.2 × 104 V/cm). However, the response time of optical modulation to step function voltage is slow (1.0-6.3 s). We propose a model for the slow transient behavior based on movable ions and a long dielectric relaxation time for the BST film, and good qualitative agreement is obtained with experimental results.

Original languageEnglish
Pages (from-to)2462-2466
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number4 B
DOIs
Publication statusPublished - 2007 Apr 24
Externally publishedYes

Keywords

  • (Ba,Sr)TiO (BST)
  • Electro optic material
  • March-Zhender interferometer
  • Monolithic fabrication
  • Optical modulator

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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