Abstract
γ'-Fe4N film was epitaxially grown on a SrTiO 3(001) substrate by molecular beam epitaxy using solid source Fe and nitrogen radical beam by electron cyclotron resonance plasma. Under the similar growth condition, we tried to grow γ'-Fe4N films epitaxially on a Si(100) substrate, because the lattice mismatch is smaller on Si(100) (1.3%) than that on SrTiO3(001) (3%). It was found from x-ray diffraction measurements that ε-Fe3N films were formed instead of γ'-Fe4N, differently from our prediction.
Original language | English |
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Pages (from-to) | 193-195 |
Number of pages | 3 |
Journal | Physics Procedia |
Volume | 11 |
DOIs | |
Publication status | Published - 2011 |
Externally published | Yes |
Keywords
- Magnetic material
- Molecular beam epixty
- Nitride
ASJC Scopus subject areas
- Physics and Astronomy(all)