Toward practically applicable MEMS

Masayoshi Esashi

doi:10.1541/ieejsmas.134.1

Toward practically applicable MEMS

Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

Abstract

MEMS (Micro Electro Mechanical Systems) play important roles as key components in systems. However it is not easy to be applied in market because these require heterogeneous knowledge and expensive facilities. Training of MEMS engineers who have practical experiences, accumulation and its exploitation of experiences and sharing of facilities are required for MEMS to be used in a market. Technical approaches for the practically applicable MEMS as hetero integration with circuit and packaging are described.

Original language	English
Pages (from-to)	1-6
Number of pages	6
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	134
Issue number	1
DOIs	https://doi.org/10.1541/ieejsmas.134.1
Publication status	Published - 2014

Keywords

Hetero integration
MEMS
Microsystem
Open collaboration
Sensor

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1541/ieejsmas.134.1

Cite this

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Toward practically applicable MEMS

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

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