Toward practically applicable MEMS

Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review


MEMS (Micro Electro Mechanical Systems) play important roles as key components in systems. However it is not easy to be applied in market because these require heterogeneous knowledge and expensive facilities. Training of MEMS engineers who have practical experiences, accumulation and its exploitation of experiences and sharing of facilities are required for MEMS to be used in a market. Technical approaches for the practically applicable MEMS as hetero integration with circuit and packaging are described.

Original languageEnglish
Pages (from-to)1-6
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Issue number1
Publication statusPublished - 2014


  • Hetero integration
  • MEMS
  • Microsystem
  • Open collaboration
  • Sensor

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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