Total Dry Electron-Beam Vacuum Lithography System for a Rotary Encoder

Yoshiyuki Uchida, Keiji Matsui, Masatoshi Sago, Kazuhiro Hane, Shinzo Morita, Shuzo Hattori

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)391-394
Number of pages4
JournalShinku/Journal of the Vacuum Society of Japan
Volume30
Issue number5
DOIs
Publication statusPublished - 1987 Jan
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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