Tip-sample capacitance in capacitance microscopy of dielectric films

Kazuya Goto, Kazuhiro Hane

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

The tip-sample capacitance in the scanning capacitance microscopy (SCM) of dielectric films is described through theoretical calculations based on the method of images. The results are explained with the charge density distribution in the tip-sample system. Furthermore, capacitance signals in the tapping mode SCM of dielectric films are experimentally investigated and found to be in good agreement with the simulation results.

Original languageEnglish
Pages (from-to)4043-4048
Number of pages6
JournalJournal of Applied Physics
Volume84
Issue number8
DOIs
Publication statusPublished - 1998 Oct 15

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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