Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium

Keizo Tsukamoto; Tetsuro Tamura; Hiromi Matsusaki; Masahide Tona; Hiroaki Yamamoto; Yuki Nakagomi; Hiroshi Nishida; Yoshihiro Hirai; Nobuo Nishimiya; Masaomi Sanekata; Keijiro Ohshimo; Kiichirou Koyasu; Fuminori Misaizu

doi:10.35848/1347-4065/ab71de

Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium

Keizo Tsukamoto, Tetsuro Tamura, Hiromi Matsusaki, Masahide Tona, Hiroaki Yamamoto, Yuki Nakagomi, Hiroshi Nishida, Yoshihiro Hirai, Nobuo Nishimiya, Masaomi Sanekata, Keijiro Ohshimo, Kiichirou Koyasu, Fuminori Misaizu

SCI - Chemistry

Research output: Contribution to journal › Article › peer-review

Abstract

A photoionization method using a vacuum ultraviolet laser was applied to the time-of-flight mass spectrometry of ions formed in high-power pulsed magnetron sputtering (HPPMS). This method is a new plasma diagnostic technique for measuring simultaneously the amounts of sputtered ionized and neutral species in HPPMS. The temporal profiles for the amounts of ions and neutrals were observed with respect to the trigger of the pulsed discharge in HPPMS. This result is discussed in connection with the atomic processes of light-emitting ionized and neutral species measured in optical emission spectroscopy for HPPMS.

Original language	English
Article number	SHHB05
Journal	Japanese journal of applied physics
Volume	59
DOIs	https://doi.org/10.35848/1347-4065/ab71de
Publication status	Published - 2020 May 1

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Tsukamoto, K., Tamura, T., Matsusaki, H., Tona, M., Yamamoto, H., Nakagomi, Y., Nishida, H., Hirai, Y., Nishimiya, N., Sanekata, M., Ohshimo, K., Koyasu, K., & Misaizu, F. (2020). Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium. Japanese journal of applied physics, 59, [SHHB05]. https://doi.org/10.35848/1347-4065/ab71de

Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium. / Tsukamoto, Keizo; Tamura, Tetsuro; Matsusaki, Hiromi; Tona, Masahide; Yamamoto, Hiroaki; Nakagomi, Yuki; Nishida, Hiroshi; Hirai, Yoshihiro; Nishimiya, Nobuo; Sanekata, Masaomi; Ohshimo, Keijiro; Koyasu, Kiichirou; Misaizu, Fuminori.

In: Japanese journal of applied physics, Vol. 59, SHHB05, 01.05.2020.

Research output: Contribution to journal › Article › peer-review

Tsukamoto, K, Tamura, T, Matsusaki, H, Tona, M, Yamamoto, H, Nakagomi, Y, Nishida, H, Hirai, Y, Nishimiya, N, Sanekata, M, Ohshimo, K, Koyasu, K & Misaizu, F 2020, 'Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium', Japanese journal of applied physics, vol. 59, SHHB05. https://doi.org/10.35848/1347-4065/ab71de

Tsukamoto, Keizo ; Tamura, Tetsuro ; Matsusaki, Hiromi ; Tona, Masahide ; Yamamoto, Hiroaki ; Nakagomi, Yuki ; Nishida, Hiroshi ; Hirai, Yoshihiro ; Nishimiya, Nobuo ; Sanekata, Masaomi ; Ohshimo, Keijiro ; Koyasu, Kiichirou ; Misaizu, Fuminori. / Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium. In: Japanese journal of applied physics. 2020 ; Vol. 59.

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abstract = "A photoionization method using a vacuum ultraviolet laser was applied to the time-of-flight mass spectrometry of ions formed in high-power pulsed magnetron sputtering (HPPMS). This method is a new plasma diagnostic technique for measuring simultaneously the amounts of sputtered ionized and neutral species in HPPMS. The temporal profiles for the amounts of ions and neutrals were observed with respect to the trigger of the pulsed discharge in HPPMS. This result is discussed in connection with the atomic processes of light-emitting ionized and neutral species measured in optical emission spectroscopy for HPPMS.",

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AU - Tona, Masahide

AU - Yamamoto, Hiroaki

AU - Nakagomi, Yuki

AU - Nishida, Hiroshi

AU - Hirai, Yoshihiro

AU - Nishimiya, Nobuo

AU - Sanekata, Masaomi

AU - Ohshimo, Keijiro

AU - Koyasu, Kiichirou

AU - Misaizu, Fuminori

PY - 2020/5/1

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AB - A photoionization method using a vacuum ultraviolet laser was applied to the time-of-flight mass spectrometry of ions formed in high-power pulsed magnetron sputtering (HPPMS). This method is a new plasma diagnostic technique for measuring simultaneously the amounts of sputtered ionized and neutral species in HPPMS. The temporal profiles for the amounts of ions and neutrals were observed with respect to the trigger of the pulsed discharge in HPPMS. This result is discussed in connection with the atomic processes of light-emitting ionized and neutral species measured in optical emission spectroscopy for HPPMS.

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