Time-modulated electron cyclotron resonance plasma discharge for controlling generation of reactive species

Seiji Samukawa, Shuichi Furuoya

Research output: Contribution to journalArticlepeer-review

109 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Time-modulated electron cyclotron resonance plasma discharge for controlling generation of reactive species'. Together they form a unique fingerprint.

Physics & Astronomy