Time-modulated electron cyclotron resonance plasma discharge for controlling generation of reactive species

Seiji Samukawa, Shuichi Furuoya

Research output: Contribution to journalArticlepeer-review

109 Citations (Scopus)

Abstract

This study examines modulated electron cyclotron resonance (ECR) plasma discharge occurring within a few tens of μs. It can control the generation of reactive species in plasmas. Reactive species are measured by an actinometric optical emission spectroscopy in the pulsed plasma. Good correlation is found between the density ratio of CF2 radicals and F atoms in the CHF 3 plasma, and the combination of the pulse duration and pulse intervals. These characteristics are explained by the dependence of reactive species generation in ECR plasma on a time within a few tens of μs. This method provides for controlling the polymerization during SiO2 etching.

Original languageEnglish
Pages (from-to)2044-2046
Number of pages3
JournalApplied Physics Letters
Volume63
Issue number15
DOIs
Publication statusPublished - 1993 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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