Time Evolution of Nucleation and Vertical Growth of Carbon Nanotubes during Plasma-Enhanced Chemical Vapor Deposition

Goo Hwan Jeong, Nobuhiko Satake, Toshiaki Kato, Takamichi Hirata, Rikizo Hatakeyama, Kazuyuki Tohji

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

We have investigated the time evolution during nanotube growth and proposed the growth mechanism in order to understand the effects of plasma properties on nanotube formation and controlled growth in the case of plasma-enhanced chemical vapor deposition. The nucleation process of multi-walled carbon nanotubes (MWNTs) firstly takes place through catalyst tip formation. MWNTs grow with a wide diameter distribution at the initial growth stage and finally attain similar diameters as growth proceeds. In addition, ion flux and bombardment energy need to be optimized during the nanotube growth for vertical alignment and a highly crystallized structure.

Original languageEnglish
Pages (from-to)L1340-L1342
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume42
Issue number11 A
Publication statusPublished - 2003 Nov 1

Keywords

  • Carbon nanotube
  • Methane-hydrogen gas mixture
  • Nucleation
  • Plasma-enhanced chemical vapor deposition
  • Time evolution
  • Vertical growth mechanism

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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