The nanomechanical properties of single-crystalline silicon cantilevers as resonating elements were investigated. It was observed that the flash heating the single-crystalline silicon cantilever at 1000°C in ultrahigh vacuum reduced the mechanical energy dissipation of the oscillating cantilever due to the removal of contaminants and natural oxide and reconstruction of the silicon surface. The Q-factor and influence of gas adsorption on ultrathin single crystalline silicon resonators having (100) and (111)-oriented surfaces were discussed.
|Number of pages||3|
|Journal||Applied Physics Letters|
|Publication status||Published - 2003 Sept 8|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)