Time dependence of energy dissipation in resonating silicon cantilevers in ultrahigh vacuum

Takahito Ono, Dong F. Wang, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)

Abstract

The nanomechanical properties of single-crystalline silicon cantilevers as resonating elements were investigated. It was observed that the flash heating the single-crystalline silicon cantilever at 1000°C in ultrahigh vacuum reduced the mechanical energy dissipation of the oscillating cantilever due to the removal of contaminants and natural oxide and reconstruction of the silicon surface. The Q-factor and influence of gas adsorption on ultrathin single crystalline silicon resonators having (100) and (111)-oriented surfaces were discussed.

Original languageEnglish
Pages (from-to)1950-1952
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number10
DOIs
Publication statusPublished - 2003 Sep 8

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Time dependence of energy dissipation in resonating silicon cantilevers in ultrahigh vacuum'. Together they form a unique fingerprint.

Cite this