A lock-in amplifier detection method for measuring the film thickness on a flat substrate has been developed by using a common-path interferometer. The signal due to the film thickness has been obtained without it being affected by the tilting of the substrate. The sensitivity was better than 0.5 nm.
- thickness measurement
- thin films
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering