Tight-binding quantum chemical molecular dynamics study on depth profile prediction in low energy boron implantation process

Hideyuki Tsuboi, Ai Sagawa, Hideki Iga, Katsumi Sasata, Tsuyoshi Masuda, Michihisa Koyama, Momoji Kubo, Ewa Broclawik, Hidehiko Yabuhara, Akira Miyamoto

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10 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science