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Tight-binding quantum chemical molecular dynamics study on depth profile prediction in low energy boron implantation process
Hideyuki Tsuboi, Ai Sagawa, Hideki Iga, Katsumi Sasata, Tsuyoshi Masuda, Michihisa Koyama, Momoji Kubo, Ewa Broclawik, Hidehiko Yabuhara, Akira Miyamoto
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)