TiC films formed by multi-stacking process for diamond contact metal electrodes

Y. Tanaka, K. Kakushima, P. Ahmet, Y. Kataoka, K. Tsutsui, A. Nishiyama, N. Sugii, K. Natori, T. Hattori, S. Yamasaki, H. Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science