Three-step phase-shifting imaging ellipsometry to measure nanofilm thickness profiles

Eita Shoji, Atsuki Komiya, Junnosuke Okajima, Masaki Kubo, Takao Tsukada

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

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Nursing and Health Professions

Earth and Planetary Sciences

Physics

Chemical Engineering

Computer Science