Three-dimensional wave optical simulation for image sensors by localized boundary element method

Hideki Mutoh, Shigetoshi Sugawa

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A novel wave optical simulation method [a localized boundary element method (BEM)] has been developed. This method enables us to execute 3-D wave optical simulation with much smaller memory space and much shorter calculation time than conventional BEMs or finite-difference time domain methods. The light gathering power dependence on cell size and microlens height and distance, the color shading characteristics of inner lens structures, and the light gathering power and cross talk of light waveguide were analyzed by this method. A smaller cell needs a shorter focal length microlens, which can be realized by inner lens structures in CCD or the waveguide structures in CMOS image sensors. It is shown that this method can optimize these structures by calculating the color shading dependence on the microlens shape and the cross talk dependence on the waveguide materials. This method was found to be powerful and useful for the 3-D wave optical analysis of image sensors.

Original languageEnglish
Pages (from-to)2473-2480
Number of pages8
JournalIEEE Transactions on Electron Devices
Volume56
Issue number11
DOIs
Publication statusPublished - 2009 Sep 29
Externally publishedYes

Keywords

  • CCD
  • CMOS image sensor
  • Color shading
  • Cross talk
  • Light pipe
  • Microlens
  • Simulation
  • Smear
  • Wave optical simulation
  • Waveguide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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