Three-dimensional structural analysis of block copolymer using dual-beam focused ion beam system

Mitsuro Kato, Toshihiko Ito, Yoshitaka Aoyama, Koji Sawa, Takeshi Kaneko, Noboru Kawase, Hiroshi Jinnai

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

Dual-beam focused ion beam system (DB-FIB) has been used to study three-dimensional (3D) structure of a poly(styrene-block-isoprene) (SI) block copolymer with domain spacing of ca. 0.1 μm, which isn't adequately observed in 3D by transmission electron microtomography (TEMT). In polymeric materials, in contrast to metals and semiconductor materials, it is difficult to obtain a series of SEM images that indicates the internal structure accurately, because of heat damage and electrostatic charge of the specimen. In the present study, the specimen, stained by 5% OsO4 for a week and applied Pt evaporation coating and Pt deposition, was fabricated (accelerating voltage of FIB; 30 kV) and observed (accelerating voltage of SEM; 1.6 kV). This condition enabled us to take clear SEM images, and resulted in a reconstruction of 3D structure of SI lamellae with domain spacing of 0.10 μm.

Original languageEnglish
Number of pages1
Publication statusPublished - 2006 Oct 18
Externally publishedYes
Event55th SPSJ Annual Meeting - Nagoya, Japan
Duration: 2006 May 242006 May 26

Other

Other55th SPSJ Annual Meeting
CountryJapan
CityNagoya
Period06/5/2406/5/26

Keywords

  • Block copolymer
  • Dual-beam focused ion beam (DB-FIB)
  • Electron tomography

ASJC Scopus subject areas

  • Engineering(all)

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