Three-dimensional structural analysis of block copolymer using dual-beam focused ion beam system

Mitsuro Kato; Toshihiko Ito; Yoshitaka Aoyama; Koji Sawa; Takeshi Kaneko; Noboru Kawase; Hiroshi Jinnai

Three-dimensional structural analysis of block copolymer using dual-beam focused ion beam system

Mitsuro Kato, Toshihiko Ito, Yoshitaka Aoyama, Koji Sawa, Takeshi Kaneko, Noboru Kawase, Hiroshi Jinnai

Research output: Contribution to conference › Paper › peer-review

Abstract

Dual-beam focused ion beam system (DB-FIB) has been used to study three-dimensional (3D) structure of a poly(styrene-block-isoprene) (SI) block copolymer with domain spacing of ca. 0.1 μm, which isn't adequately observed in 3D by transmission electron microtomography (TEMT). In polymeric materials, in contrast to metals and semiconductor materials, it is difficult to obtain a series of SEM images that indicates the internal structure accurately, because of heat damage and electrostatic charge of the specimen. In the present study, the specimen, stained by 5% OsO₄ for a week and applied Pt evaporation coating and Pt deposition, was fabricated (accelerating voltage of FIB; 30 kV) and observed (accelerating voltage of SEM; 1.6 kV). This condition enabled us to take clear SEM images, and resulted in a reconstruction of 3D structure of SI lamellae with domain spacing of 0.10 μm.

Original language	English
Number of pages	1
Publication status	Published - 2006 Oct 18
Externally published	Yes
Event	55th SPSJ Annual Meeting - Nagoya, Japan Duration: 2006 May 24 → 2006 May 26

Other

Other	55th SPSJ Annual Meeting
Country	Japan
City	Nagoya
Period	06/5/24 → 06/5/26

Keywords

Block copolymer
Dual-beam focused ion beam (DB-FIB)
Electron tomography

ASJC Scopus subject areas

Engineering(all)

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title = "Three-dimensional structural analysis of block copolymer using dual-beam focused ion beam system",

abstract = "Dual-beam focused ion beam system (DB-FIB) has been used to study three-dimensional (3D) structure of a poly(styrene-block-isoprene) (SI) block copolymer with domain spacing of ca. 0.1 μm, which isn't adequately observed in 3D by transmission electron microtomography (TEMT). In polymeric materials, in contrast to metals and semiconductor materials, it is difficult to obtain a series of SEM images that indicates the internal structure accurately, because of heat damage and electrostatic charge of the specimen. In the present study, the specimen, stained by 5% OsO4 for a week and applied Pt evaporation coating and Pt deposition, was fabricated (accelerating voltage of FIB; 30 kV) and observed (accelerating voltage of SEM; 1.6 kV). This condition enabled us to take clear SEM images, and resulted in a reconstruction of 3D structure of SI lamellae with domain spacing of 0.10 μm.",

keywords = "Block copolymer, Dual-beam focused ion beam (DB-FIB), Electron tomography",

author = "Mitsuro Kato and Toshihiko Ito and Yoshitaka Aoyama and Koji Sawa and Takeshi Kaneko and Noboru Kawase and Hiroshi Jinnai",

year = "2006",

month = oct,

day = "18",

language = "English",

note = "55th SPSJ Annual Meeting ; Conference date: 24-05-2006 Through 26-05-2006",

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T1 - Three-dimensional structural analysis of block copolymer using dual-beam focused ion beam system

AU - Kato, Mitsuro

AU - Ito, Toshihiko

AU - Aoyama, Yoshitaka

AU - Sawa, Koji

AU - Kaneko, Takeshi

AU - Kawase, Noboru

AU - Jinnai, Hiroshi

PY - 2006/10/18

Y1 - 2006/10/18

N2 - Dual-beam focused ion beam system (DB-FIB) has been used to study three-dimensional (3D) structure of a poly(styrene-block-isoprene) (SI) block copolymer with domain spacing of ca. 0.1 μm, which isn't adequately observed in 3D by transmission electron microtomography (TEMT). In polymeric materials, in contrast to metals and semiconductor materials, it is difficult to obtain a series of SEM images that indicates the internal structure accurately, because of heat damage and electrostatic charge of the specimen. In the present study, the specimen, stained by 5% OsO4 for a week and applied Pt evaporation coating and Pt deposition, was fabricated (accelerating voltage of FIB; 30 kV) and observed (accelerating voltage of SEM; 1.6 kV). This condition enabled us to take clear SEM images, and resulted in a reconstruction of 3D structure of SI lamellae with domain spacing of 0.10 μm.

AB - Dual-beam focused ion beam system (DB-FIB) has been used to study three-dimensional (3D) structure of a poly(styrene-block-isoprene) (SI) block copolymer with domain spacing of ca. 0.1 μm, which isn't adequately observed in 3D by transmission electron microtomography (TEMT). In polymeric materials, in contrast to metals and semiconductor materials, it is difficult to obtain a series of SEM images that indicates the internal structure accurately, because of heat damage and electrostatic charge of the specimen. In the present study, the specimen, stained by 5% OsO4 for a week and applied Pt evaporation coating and Pt deposition, was fabricated (accelerating voltage of FIB; 30 kV) and observed (accelerating voltage of SEM; 1.6 kV). This condition enabled us to take clear SEM images, and resulted in a reconstruction of 3D structure of SI lamellae with domain spacing of 0.10 μm.

KW - Block copolymer

KW - Dual-beam focused ion beam (DB-FIB)

KW - Electron tomography

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T2 - 55th SPSJ Annual Meeting

Y2 - 24 May 2006 through 26 May 2006

ER -