Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator

Minoru Sasaki, Danick Briand, Wilfried Noell, Nicolaas F. De Rooij, Kazuhiro Hane

Research output: Contribution to journalArticle

36 Citations (Scopus)

Abstract

A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and obtainable accuracy of the displacement are examined. Using the lateral dimension control of the bridge and the supporting beams, the vertical positioning is realized based on the planer photolithography. As a demonstration, a vertical comb drive actuator is prepared and its performance is examined.

Original languageEnglish
Pages (from-to)455-461
Number of pages7
JournalIEEE Journal on Selected Topics in Quantum Electronics
Volume10
Issue number3
DOIs
Publication statusPublished - 2004 May 1

Keywords

  • Buckling
  • Silicon-on-insulator microelectromechanical systems (SOI-MEMS)
  • Three-dimensional (3-D) structure
  • Vertical comb drive actuator

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator'. Together they form a unique fingerprint.

  • Cite this