Abstract
In this paper, three-dimensional holographic pattern projection using computer-generated hologram was studied. The computer-generated Fresnel hologram was calculated by Mori's data suppression algorithm. The computer system for generating holograms was constructed and the hologram was fabricated by the photo-mask pattern generator. Using the fabricated hologram and a He-Cd laser (325nm), the patterns were generated on the resist film in the three-dimensional space.
| Original language | English |
|---|---|
| Pages (from-to) | 141-144 |
| Number of pages | 4 |
| Journal | Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering |
| Volume | 65 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1999 Jan |
| Externally published | Yes |
Keywords
- Computer-generated hologram
- Laser diffraction
- Optical lithography
- Pattern projection
ASJC Scopus subject areas
- Mechanical Engineering