Three-dimensional pattern projection using computer-generated Fresnel hologram

Kazuhiro Hane, Takashi Hagihara, Mitsunobu Yoshida, Minoru Sasaki

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

In this paper, three-dimensional holographic pattern projection using computer-generated hologram was studied. The computer-generated Fresnel hologram was calculated by Mori's data suppression algorithm. The computer system for generating holograms was constructed and the hologram was fabricated by the photo-mask pattern generator. Using the fabricated hologram and a He-Cd laser (325nm), the patterns were generated on the resist film in the three-dimensional space.

Original languageEnglish
Pages (from-to)141-144
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume65
Issue number1
DOIs
Publication statusPublished - 1999 Jan

Keywords

  • Computer-generated hologram
  • Laser diffraction
  • Optical lithography
  • Pattern projection

ASJC Scopus subject areas

  • Mechanical Engineering

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