The well-controlled, complex three-dimensional fiber structures would be more useful as optical devices and sensors. Optical fiber micro-machining was attempted by combination of plasma etching and photolithography technology. In addition, a Ni plating technology and Ni stencil mask were introduced newly into fiber micro-machining. As the results, optical fibers with periodically stepped diameter or with micro-holes were realized and discussed as wavelength filter or transmitted light monitor.
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering