Three-dimensional micro-machining for fiber type optical control devices

Hironori Kumazaki, Seiki Inaba, Kazuhiro Hane, Yuji Nasu

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The well-controlled, complex three-dimensional fiber structures would be more useful as optical devices and sensors. Optical fiber micro-machining was attempted by combination of plasma etching and photolithography technology. In addition, a Ni plating technology and Ni stencil mask were introduced newly into fiber micro-machining. As the results, optical fibers with periodically stepped diameter or with micro-holes were realized and discussed as wavelength filter or transmitted light monitor.

Original languageEnglish
Pages (from-to)211-215
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Volume125
Issue number5
DOIs
Publication statusPublished - 2005

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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