Three dimensional characterization of dopant distribution in polycrystalline silicon by laser-assisted atom probe

K. Inoue, F. Yano, A. Nishida, T. Tsunomura, T. Toyama, Y. Nagai, M. Hasegawa

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Three dimensional characterization of dopant distribution in polycrystalline silicon by laser-assisted atom probe'. Together they form a unique fingerprint.

Engineering

Chemistry

Physics

Material Science

Chemical Engineering