Abstract
Three-dimensional elemental mappings of Co-Cr-Ta thin film sputter-deposited at 200°C were obtained using a three-dimensional atom probe. We have confirmed that Ta atoms are dissolved in the film homogeneously, and no segregation of Ta was found at the grain boundaries. On the other hand, Cr atoms are inhomogenously dissolved within grains, and it is strongly enriched at the grain boundaries formins a Cr-enriched grain boundary phase with a thickness of approximately 4 nm.
Original language | English |
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Pages (from-to) | 3095-3097 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 69 |
Issue number | 20 |
DOIs | |
Publication status | Published - 1996 Nov 11 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)