Three-dimensional atom probe analysis of Co-Cr-Ta thin film

J. Nishimaki, K. Hono, N. Hasegawa, T. Sakurai

    Research output: Contribution to journalArticlepeer-review

    7 Citations (Scopus)


    Three-dimensional elemental mappings of Co-Cr-Ta thin film sputter-deposited at 200°C were obtained using a three-dimensional atom probe. We have confirmed that Ta atoms are dissolved in the film homogeneously, and no segregation of Ta was found at the grain boundaries. On the other hand, Cr atoms are inhomogenously dissolved within grains, and it is strongly enriched at the grain boundaries formins a Cr-enriched grain boundary phase with a thickness of approximately 4 nm.

    Original languageEnglish
    Pages (from-to)3095-3097
    Number of pages3
    JournalApplied Physics Letters
    Issue number20
    Publication statusPublished - 1996 Nov 11

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)


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