Three-dimensional atom probe analysis of Co-Cr-Ta thin film

J. Nishimaki; K. Hono; N. Hasegawa; T. Sakurai

doi:10.1063/1.117316

Three-dimensional atom probe analysis of Co-Cr-Ta thin film

J. Nishimaki, K. Hono, N. Hasegawa, T. Sakurai

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Three-dimensional elemental mappings of Co-Cr-Ta thin film sputter-deposited at 200°C were obtained using a three-dimensional atom probe. We have confirmed that Ta atoms are dissolved in the film homogeneously, and no segregation of Ta was found at the grain boundaries. On the other hand, Cr atoms are inhomogenously dissolved within grains, and it is strongly enriched at the grain boundaries formins a Cr-enriched grain boundary phase with a thickness of approximately 4 nm.

Original language	English
Pages (from-to)	3095-3097
Number of pages	3
Journal	Applied Physics Letters
Volume	69
Issue number	20
DOIs	https://doi.org/10.1063/1.117316
Publication status	Published - 1996 Nov 11

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.117316

Cite this

@article{155934ce1eb145cf8f0c80ef21eb2b3e,

title = "Three-dimensional atom probe analysis of Co-Cr-Ta thin film",

abstract = "Three-dimensional elemental mappings of Co-Cr-Ta thin film sputter-deposited at 200°C were obtained using a three-dimensional atom probe. We have confirmed that Ta atoms are dissolved in the film homogeneously, and no segregation of Ta was found at the grain boundaries. On the other hand, Cr atoms are inhomogenously dissolved within grains, and it is strongly enriched at the grain boundaries formins a Cr-enriched grain boundary phase with a thickness of approximately 4 nm.",

author = "J. Nishimaki and K. Hono and N. Hasegawa and T. Sakurai",

year = "1996",

month = nov,

day = "11",

doi = "10.1063/1.117316",

language = "English",

volume = "69",

pages = "3095--3097",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "20",

}

TY - JOUR

T1 - Three-dimensional atom probe analysis of Co-Cr-Ta thin film

AU - Nishimaki, J.

AU - Hono, K.

AU - Hasegawa, N.

AU - Sakurai, T.

PY - 1996/11/11

Y1 - 1996/11/11

N2 - Three-dimensional elemental mappings of Co-Cr-Ta thin film sputter-deposited at 200°C were obtained using a three-dimensional atom probe. We have confirmed that Ta atoms are dissolved in the film homogeneously, and no segregation of Ta was found at the grain boundaries. On the other hand, Cr atoms are inhomogenously dissolved within grains, and it is strongly enriched at the grain boundaries formins a Cr-enriched grain boundary phase with a thickness of approximately 4 nm.

AB - Three-dimensional elemental mappings of Co-Cr-Ta thin film sputter-deposited at 200°C were obtained using a three-dimensional atom probe. We have confirmed that Ta atoms are dissolved in the film homogeneously, and no segregation of Ta was found at the grain boundaries. On the other hand, Cr atoms are inhomogenously dissolved within grains, and it is strongly enriched at the grain boundaries formins a Cr-enriched grain boundary phase with a thickness of approximately 4 nm.

UR - http://www.scopus.com/inward/record.url?scp=0001513768&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001513768&partnerID=8YFLogxK

U2 - 10.1063/1.117316

DO - 10.1063/1.117316

M3 - Article

AN - SCOPUS:0001513768

VL - 69

SP - 3095

EP - 3097

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 20

ER -

Three-dimensional atom probe analysis of Co-Cr-Ta thin film

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this