Three-dimensional atom probe analysis of a sputter-deposited Co-Cr thin film

K. Hono, K. Yeh, Y. Maeda, T. Sakurai

    Research output: Contribution to journalArticlepeer-review

    14 Citations (Scopus)


    Three-dimensional atom probe (3DAP) was employed to study nanoscale compositional heterogeneities in Co-22 at. %Cr sputter-deposited thin films. Compositional fluctuations were visualized on a nanometer scale through a 3D reconstruction of collected atoms. Transmission electron microscopy observations of the same specimen area of before and after 3DAP analysis made it possible to scale the analyzed volume precisely. The resulting data show that a Co-22 at. %Cr thin film sputter deposited at elevated temperature was composed of two phases with a lamellarlike structure, one phase was ferromagnetic containing approximately 90 at. %Co, and the other was paramagnetic, containing approximately 60 at. %Co.

    Original languageEnglish
    Number of pages1
    JournalApplied Physics Letters
    Publication statusPublished - 1995

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)


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