Three-axis capacitive accelerometer with uniform axial sensitivities

T. Mineta, S. Kobayashi, Y. Watanabe, S. Kanauchi, I. Nakagawa, E. Suganuma, M. Esashi

Research output: Contribution to journalArticlepeer-review

56 Citations (Scopus)

Abstract

A three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed using a micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can be detected by parallel shift and tilt of a seismic mass, respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by a three-dimensional sensor structure.

Original languageEnglish
Pages (from-to)431-435
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume6
Issue number4
DOIs
Publication statusPublished - 1996 Dec 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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