Abstract
Three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed by using micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can detect by parallel shift and tilt of a seismic mass respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by three dimensional sensor structure.
| Original language | English |
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| Pages | 554-557 |
| Number of pages | 4 |
| Publication status | Published - 1995 Dec 1 |
| Event | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 1995 Jun 25 → 1995 Jun 29 |
Other
| Other | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) |
|---|---|
| City | Stockholm, Sweden |
| Period | 95/6/25 → 95/6/29 |
ASJC Scopus subject areas
- Engineering(all)