Three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed by using micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can detect by parallel shift and tilt of a seismic mass respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by three dimensional sensor structure.
|Number of pages||4|
|Publication status||Published - 1995 Dec 1|
|Event||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden|
Duration: 1995 Jun 25 → 1995 Jun 29
|Other||Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)|
|Period||95/6/25 → 95/6/29|
ASJC Scopus subject areas