Three-axis capacitive accelerometer with uniform axial sensitivities

T. Mineta, S. Kobayashi, Y. Watanabe, S. Kanauchi, I. Nakagawa, E. Suganuma, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

27 Citations (Scopus)

Abstract

Three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed by using micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can detect by parallel shift and tilt of a seismic mass respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by three dimensional sensor structure.

Original languageEnglish
Pages554-557
Number of pages4
Publication statusPublished - 1995 Dec 1
EventProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
Duration: 1995 Jun 251995 Jun 29

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CityStockholm, Sweden
Period95/6/2595/6/29

ASJC Scopus subject areas

  • Engineering(all)

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