Three-axis capacitive accelerometer with uniform axial sensitivities

T. Mineta; S. Kobayashi; Y. Watanabe; S. Kanauchi; I. Nakagawa; E. Suganuma; Masayoshi Esashi

Three-axis capacitive accelerometer with uniform axial sensitivities

T. Mineta, S. Kobayashi, Y. Watanabe, S. Kanauchi, I. Nakagawa, E. Suganuma, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to conference › Paper › peer-review

27 Citations (Scopus)

Abstract

Three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed by using micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can detect by parallel shift and tilt of a seismic mass respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by three dimensional sensor structure.

Original language	English
Pages	554-557
Number of pages	4
Publication status	Published - 1995 Dec 1
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 1995 Jun 25 → 1995 Jun 29

Other

Other	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
City	Stockholm, Sweden
Period	95/6/25 → 95/6/29

ASJC Scopus subject areas

Engineering(all)

Cite this

Three-axis capacitive accelerometer with uniform axial sensitivities. / Mineta, T.; Kobayashi, S.; Watanabe, Y.; Kanauchi, S.; Nakagawa, I.; Suganuma, E.; Esashi, Masayoshi.

1995. 554-557 Paper presented at Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden.

Research output: Contribution to conference › Paper › peer-review

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T1 - Three-axis capacitive accelerometer with uniform axial sensitivities

AU - Mineta, T.

AU - Kobayashi, S.

AU - Watanabe, Y.

AU - Kanauchi, S.

AU - Nakagawa, I.

AU - Suganuma, E.

AU - Esashi, Masayoshi

PY - 1995/12/1

Y1 - 1995/12/1

N2 - Three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed by using micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can detect by parallel shift and tilt of a seismic mass respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by three dimensional sensor structure.

AB - Three-axis capacitive accelerometer which has uniform sensitivities to three axes was developed by using micromachining technique. This sensor has a seismic mass whose center of gravity is raised above suspending beams so that longitudinal and lateral accelerations can detect by parallel shift and tilt of a seismic mass respectively. Uniform axial sensitivities without cross axis sensitivity could be realized by three dimensional sensor structure.

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T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Three-axis capacitive accelerometer with uniform axial sensitivities

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ASJC Scopus subject areas

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