Thin palladium membrane microreactor with porous silicon support and their application in hydrogenation reaction

Shu Ying Ye, Shuji Tanaka, Masayoshi Esashi, Satoshi Hamakawa, Takaaki Hanaoka, Fujio Mizukami

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We microfabricated a MEMS (Micro Electro Mechanical System) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2 s-1 at 250°C and a partial pressure difference of 110 kPa. H2/N2 and H2/He selectivity was about 46 and 10 at 250°C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. We also carried out the hydrogenation of 1-butene at 250°C using the developed microreactor.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages2078-2080
Number of pages3
Publication statusPublished - 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume2

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/TerritoryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • Hydrogen permeation
  • Micro electromechanical system (MEMS)
  • Microreactor
  • Palladium membrane
  • Porous silicon

ASJC Scopus subject areas

  • Engineering(all)

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