@inproceedings{83c185d203404fa9a4efefd6810e8561,
title = "Thin palladium membrane microreactor with porous silicon support and their application in hydrogenation reaction",
abstract = "We microfabricated a MEMS (Micro Electro Mechanical System) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2 s-1 at 250°C and a partial pressure difference of 110 kPa. H2/N2 and H2/He selectivity was about 46 and 10 at 250°C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. We also carried out the hydrogenation of 1-butene at 250°C using the developed microreactor.",
keywords = "Hydrogen permeation, Micro electromechanical system (MEMS), Microreactor, Palladium membrane, Porous silicon",
author = "Ye, {Shu Ying} and Shuji Tanaka and Masayoshi Esashi and Satoshi Hamakawa and Takaaki Hanaoka and Fujio Mizukami",
year = "2005",
language = "English",
isbn = "0780389948",
series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",
pages = "2078--2080",
booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",
note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}