Thin Films on Silicon

Simo Eränen, Pekka Törmä, Pilar Gonzalez, Xavier Rottenberg, Riikka L. Puurunen, Matti Putkonen, Andreas Vogl, Frode Tyholdt, Hannah Tofteberg, Paul Muralt, Parmanand Sharma, Akihisa Inoue

Research output: Chapter in Book/Report/Conference proceedingChapter

4 Citations (Scopus)
Original languageEnglish
Title of host publicationHandbook of Silicon Based MEMS Materials and Technologies
Subtitle of host publicationSecond Edition
PublisherElsevier Inc.
Pages124-205
Number of pages82
ISBN (Electronic)9780323312233
ISBN (Print)9780323299657
DOIs
Publication statusPublished - 2015 Jan 1

ASJC Scopus subject areas

  • Engineering(all)

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