Thin film synthesis of wurtzite boron nitride by femtosecond, pulsed laser deposition

Tasuku Shimizu; Takahiro Nakamura; Shunichi Sato

doi:10.1117/12.755970

Thin film synthesis of wurtzite boron nitride by femtosecond, pulsed laser deposition

Tasuku Shimizu, Takahiro Nakamura, Shunichi Sato

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Thin films of boron nitride were grown by femtosecond, pulsed laser deposition. The films were analyzed by transmission electron microscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. All the results indicated the presence of wurtzite phase in the thin film in contrast to usual phases such as cubic or hexagonal ones. Moreover, the electron diffraction pattern showed that the size of the wurtzite boron nitride crystallite was larger than 4 μm although boron nitride films reported so far consisted of small crystallites in the nanometer region.

Original language	English
Title of host publication	ROMOPTO 2006
Subtitle of host publication	Eighth Conference on Optics
Volume	6785
DOIs	https://doi.org/10.1117/12.755970
Publication status	Published - 2007 Nov 26
Externally published	Yes
Event	ROMOPTO 2006: Eighth Conference on Optics - Sibiu Duration: 2006 Sep 4 → 2006 Sep 7

Other

Other	ROMOPTO 2006: Eighth Conference on Optics
City	Sibiu
Period	06/9/4 → 06/9/7

Keywords

Boron nitride
Femtosecond laser
Pulsed laser deposition
Thin film
Wurtzite structure

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

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10.1117/12.755970

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@inproceedings{3202fcf63b5f434aa3c9fbf3ab2ee8e7,

title = "Thin film synthesis of wurtzite boron nitride by femtosecond, pulsed laser deposition",

abstract = "Thin films of boron nitride were grown by femtosecond, pulsed laser deposition. The films were analyzed by transmission electron microscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. All the results indicated the presence of wurtzite phase in the thin film in contrast to usual phases such as cubic or hexagonal ones. Moreover, the electron diffraction pattern showed that the size of the wurtzite boron nitride crystallite was larger than 4 μm although boron nitride films reported so far consisted of small crystallites in the nanometer region.",

keywords = "Boron nitride, Femtosecond laser, Pulsed laser deposition, Thin film, Wurtzite structure",

author = "Tasuku Shimizu and Takahiro Nakamura and Shunichi Sato",

year = "2007",

month = nov,

day = "26",

doi = "10.1117/12.755970",

language = "English",

isbn = "0819469491",

volume = "6785",

booktitle = "ROMOPTO 2006",

note = "ROMOPTO 2006: Eighth Conference on Optics ; Conference date: 04-09-2006 Through 07-09-2006",

}

TY - GEN

T1 - Thin film synthesis of wurtzite boron nitride by femtosecond, pulsed laser deposition

AU - Shimizu, Tasuku

AU - Nakamura, Takahiro

AU - Sato, Shunichi

PY - 2007/11/26

Y1 - 2007/11/26

N2 - Thin films of boron nitride were grown by femtosecond, pulsed laser deposition. The films were analyzed by transmission electron microscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. All the results indicated the presence of wurtzite phase in the thin film in contrast to usual phases such as cubic or hexagonal ones. Moreover, the electron diffraction pattern showed that the size of the wurtzite boron nitride crystallite was larger than 4 μm although boron nitride films reported so far consisted of small crystallites in the nanometer region.

AB - Thin films of boron nitride were grown by femtosecond, pulsed laser deposition. The films were analyzed by transmission electron microscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. All the results indicated the presence of wurtzite phase in the thin film in contrast to usual phases such as cubic or hexagonal ones. Moreover, the electron diffraction pattern showed that the size of the wurtzite boron nitride crystallite was larger than 4 μm although boron nitride films reported so far consisted of small crystallites in the nanometer region.

KW - Boron nitride

KW - Femtosecond laser

KW - Pulsed laser deposition

KW - Thin film

KW - Wurtzite structure

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U2 - 10.1117/12.755970

DO - 10.1117/12.755970

M3 - Conference contribution

AN - SCOPUS:36248985160

SN - 0819469491

SN - 9780819469496

VL - 6785

BT - ROMOPTO 2006

T2 - ROMOPTO 2006: Eighth Conference on Optics

Y2 - 4 September 2006 through 7 September 2006

ER -

Thin film synthesis of wurtzite boron nitride by femtosecond, pulsed laser deposition

Abstract

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Keywords

ASJC Scopus subject areas

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