Thin film synthesis of wurtzite boron nitride by femtosecond, pulsed laser deposition

Tasuku Shimizu, Takahiro Nakamura, Shunichi Sato

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Thin films of boron nitride were grown by femtosecond, pulsed laser deposition. The films were analyzed by transmission electron microscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. All the results indicated the presence of wurtzite phase in the thin film in contrast to usual phases such as cubic or hexagonal ones. Moreover, the electron diffraction pattern showed that the size of the wurtzite boron nitride crystallite was larger than 4 μm although boron nitride films reported so far consisted of small crystallites in the nanometer region.

Original languageEnglish
Title of host publicationROMOPTO 2006
Subtitle of host publicationEighth Conference on Optics
Volume6785
DOIs
Publication statusPublished - 2007 Nov 26
EventROMOPTO 2006: Eighth Conference on Optics - Sibiu
Duration: 2006 Sep 42006 Sep 7

Other

OtherROMOPTO 2006: Eighth Conference on Optics
CitySibiu
Period06/9/406/9/7

Keywords

  • Boron nitride
  • Femtosecond laser
  • Pulsed laser deposition
  • Thin film
  • Wurtzite structure

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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