Thin film photodiode with resonant cavity for increasing signal of standing wave detection type interferometer

M. Sasaki, F. Nakai, X. Mi, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Laser interferometry is a well-developed and useful technique having advantages of high accuracy and non-contact measuring method. Many industrial instruments require small sensors having high accuracy and high-speed response. If the laser interferometer can be integrated in a small package meeting the requirements, there are large application areas. The interference signal from the new PD is rather generated by a convolution of two different resonant fields, not by the simple standing wave detection. The incoming light will be in resonance with Fabry-Perot cavity and large optical intensity is stored inside the Si sensing layer. The transmitted light is again back reflected from the reflection mirror, and also generates the resonance field in the Si layer. These two resonance fields interfere with each other resulting in the intensity modulation depending on the outer reflection mirror position.

Original languageEnglish
Title of host publication2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages25-26
Number of pages2
ISBN (Print)0780375955, 9780780375956
DOIs
Publication statusPublished - 2002
EventIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland
Duration: 2002 Aug 202002 Aug 23

Other

OtherIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
CountrySwitzerland
CityLugano
Period02/8/2002/8/23

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Fingerprint Dive into the research topics of 'Thin film photodiode with resonant cavity for increasing signal of standing wave detection type interferometer'. Together they form a unique fingerprint.

  • Cite this

    Sasaki, M., Nakai, F., Mi, X., & Hane, K. (2002). Thin film photodiode with resonant cavity for increasing signal of standing wave detection type interferometer. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 25-26). [1031426] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2002.1031426