Abstract
A highly sensitive and broadband method of obtaining thin film permeability without limitations in sample size was developed based on the high-frequency impedance change because of skin effect. A meander-type probe (3.5 mm×2.5 mm, 2 turns) was placed in proximity of a (Co25Fe75) 90B10 film (45 mm×25 mm, 0.53 μm thick), and the permeability was optimized by Newton-Raphson method. The measured values are in good agreements with theoretical values based on the Landau-Lifshitz-Gilbert equation up to 10.6 GHz. The proposed method shows promise for measuring the permeability of wafer-sized samples in line because it is not restricted by size limitations.
Original language | English |
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Article number | 6028234 |
Pages (from-to) | 2570-2572 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 47 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2011 Oct |
Keywords
- Meander probe
- skin effect
- thin film permeability
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering