Thin film permeability evaluation based on skin effect using meander-type probe up to 10.6 GHz

S. Yabukami, A. Sato, J. Takahashi, T. Ozawa, Y. Miyazawa, K. Yanagi, Y. Shimada, M. Munakata, T. Shiokawa

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A highly sensitive and broadband method of obtaining thin film permeability without limitations in sample size was developed based on the high-frequency impedance change because of skin effect. A meander-type probe (3.5 mm×2.5 mm, 2 turns) was placed in proximity of a (Co25Fe75) 90B10 film (45 mm×25 mm, 0.53 μm thick), and the permeability was optimized by Newton-Raphson method. The measured values are in good agreements with theoretical values based on the Landau-Lifshitz-Gilbert equation up to 10.6 GHz. The proposed method shows promise for measuring the permeability of wafer-sized samples in line because it is not restricted by size limitations.

Original languageEnglish
Article number6028234
Pages (from-to)2570-2572
Number of pages3
JournalIEEE Transactions on Magnetics
Volume47
Issue number10
DOIs
Publication statusPublished - 2011 Oct

Keywords

  • Meander probe
  • skin effect
  • thin film permeability

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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