Thin film permeability evaluation based on skin effect using meander-type probe up to 10.6 GHz

S. Yabukami; A. Sato; J. Takahashi; T. Ozawa; Y. Miyazawa; K. Yanagi; Y. Shimada; M. Munakata; T. Shiokawa

doi:10.1109/TMAG.2011.2158396

Thin film permeability evaluation based on skin effect using meander-type probe up to 10.6 GHz

S. Yabukami, A. Sato, J. Takahashi, T. Ozawa, Y. Miyazawa, K. Yanagi, Y. Shimada, M. Munakata, T. Shiokawa

MEN - Biomedical Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A highly sensitive and broadband method of obtaining thin film permeability without limitations in sample size was developed based on the high-frequency impedance change because of skin effect. A meander-type probe (3.5 mm×2.5 mm, 2 turns) was placed in proximity of a (Co₂₅Fe₇₅) ₉₀B₁₀ film (45 mm×25 mm, 0.53 μm thick), and the permeability was optimized by Newton-Raphson method. The measured values are in good agreements with theoretical values based on the Landau-Lifshitz-Gilbert equation up to 10.6 GHz. The proposed method shows promise for measuring the permeability of wafer-sized samples in line because it is not restricted by size limitations.

Original language	English
Article number	6028234
Pages (from-to)	2570-2572
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	47
Issue number	10
DOIs	https://doi.org/10.1109/TMAG.2011.2158396
Publication status	Published - 2011 Oct

Keywords

Meander probe
skin effect
thin film permeability

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/TMAG.2011.2158396

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@article{8483a0ad34d1481594bf4fed77f01af6,

title = "Thin film permeability evaluation based on skin effect using meander-type probe up to 10.6 GHz",

abstract = "A highly sensitive and broadband method of obtaining thin film permeability without limitations in sample size was developed based on the high-frequency impedance change because of skin effect. A meander-type probe (3.5 mm×2.5 mm, 2 turns) was placed in proximity of a (Co25Fe75) 90B10 film (45 mm×25 mm, 0.53 μm thick), and the permeability was optimized by Newton-Raphson method. The measured values are in good agreements with theoretical values based on the Landau-Lifshitz-Gilbert equation up to 10.6 GHz. The proposed method shows promise for measuring the permeability of wafer-sized samples in line because it is not restricted by size limitations.",

keywords = "Meander probe, skin effect, thin film permeability",

author = "S. Yabukami and A. Sato and J. Takahashi and T. Ozawa and Y. Miyazawa and K. Yanagi and Y. Shimada and M. Munakata and T. Shiokawa",

note = "Funding Information: This work was supported in part by the Japan Science and Technology Bureau (Local Needs Rapid Response Type). The authors would like to thank the Machine Shop of Tohoku Gakuin University for the help of fabricating the probe.",

year = "2011",

month = oct,

doi = "10.1109/TMAG.2011.2158396",

language = "English",

volume = "47",

pages = "2570--2572",

journal = "IEEE Transactions on Magnetics",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

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AU - Yabukami, S.

AU - Sato, A.

AU - Takahashi, J.

AU - Ozawa, T.

AU - Miyazawa, Y.

AU - Yanagi, K.

AU - Shimada, Y.

AU - Munakata, M.

AU - Shiokawa, T.

N1 - Funding Information: This work was supported in part by the Japan Science and Technology Bureau (Local Needs Rapid Response Type). The authors would like to thank the Machine Shop of Tohoku Gakuin University for the help of fabricating the probe.

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AB - A highly sensitive and broadband method of obtaining thin film permeability without limitations in sample size was developed based on the high-frequency impedance change because of skin effect. A meander-type probe (3.5 mm×2.5 mm, 2 turns) was placed in proximity of a (Co25Fe75) 90B10 film (45 mm×25 mm, 0.53 μm thick), and the permeability was optimized by Newton-Raphson method. The measured values are in good agreements with theoretical values based on the Landau-Lifshitz-Gilbert equation up to 10.6 GHz. The proposed method shows promise for measuring the permeability of wafer-sized samples in line because it is not restricted by size limitations.

KW - Meander probe

KW - skin effect

KW - thin film permeability

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