Thin film lithium ion batteries prepared only by pulsed laser deposition

All solid-state thin film batteries consisting of an amorphous Li-V-Si-O (LVSO) solid electrolyte, layered rocksalt LiCoO₂ and spinel phase LiMn₂O₄ cathodes, and amorphous SnO anode were fabricated only by sequential pulsed laser deposition (PLD) technique. The crystal structure of the cathode films was characterized by XRD. The post-annealed cathode films exhibit the characteristic crystal structures while as-deposited cathode films are amorphous or partially crystallized. The rough surface is observed for the post-annealed films. The thin-film battery was characterized by a FE-SEM, charge-discharge measurements and cyclic voltammmetry. As well as the LiCoO₂, the new cathode film of LiMn₂O₄ can be utilized for all-solid-state batteries, and their electrochemical properties are reported. The capacities of the thin-film batteries with annealed cathode films are 10 times larger than that of the as-deposited films. The as-deposited film shows a very low capacity even in the liquid electrolyte cell system.