The Li4SiO4 thin film was successfully deposited by pulsed laser deposition (PLD) technique using an ArF excimer laser. The morphology, the micro structure and the ionic conductivity of me Li 4SiO4 film were investigated. The ionic conductivity was 4.1×10 -7Scm-1 at 25°C. A solid-state thin film battery (TFB) consisting of the amorphous Li4SiO4 electrolyte with LiCoO2 positive electrode and Li metal negative electrode was fabricated and characterized. The TFB exhibited good reversibility on CV cycles for more man 50 cycles between 3.0 and 4.4V.