Thin film ellipsometry at a photon energy of 97eV

M. Yamamoto; K. Mayama; H. Kimura; Y. Goto; M. Yanagihara

doi:10.1016/0368-2048(96)03017-4

Thin film ellipsometry at a photon energy of 97eV

M. Yamamoto, K. Mayama, H. Kimura, Y. Goto, M. Yanagihara

Institute of Multidisciplinary Research for Advanced Materials (IMRAM)

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

We report the first multiple angle of incidence ellipsometry in the Extreme Ultra-Violet region. Extreme sensitivity to sub-atomic size of the relative amplitude attenuation of a thin film sample is evident. A large variation of the states of polarization was observed as the angle of incidence was varied. Best fit analysis with a model of a single layer with rough boundaries shows that EUV ellipsometry is sensitive enough to resolve the refractive index of 0.001 and the thickness of 0.1nm.

Original language	English
Pages (from-to)	465-468
Number of pages	4
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	80
DOIs	https://doi.org/10.1016/0368-2048(96)03017-4
Publication status	Published - 1996 May

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

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author = "M. Yamamoto and K. Mayama and H. Kimura and Y. Goto and M. Yanagihara",

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T1 - Thin film ellipsometry at a photon energy of 97eV

AU - Yamamoto, M.

AU - Mayama, K.

AU - Kimura, H.

AU - Goto, Y.

AU - Yanagihara, M.

PY - 1996/5

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AB - We report the first multiple angle of incidence ellipsometry in the Extreme Ultra-Violet region. Extreme sensitivity to sub-atomic size of the relative amplitude attenuation of a thin film sample is evident. A large variation of the states of polarization was observed as the angle of incidence was varied. Best fit analysis with a model of a single layer with rough boundaries shows that EUV ellipsometry is sensitive enough to resolve the refractive index of 0.001 and the thickness of 0.1nm.

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