Thickness effect on 1 GHz permeability of (CoFeB)-(SiO2) films with high electrical resistivity

Makoto Munakata, Masaaki Yagi, Mashio Motoyama, Yutaka Shimada, Makoto Baba, Masahiro Yamaguchi, Ken Ichi Arai

Research output: Contribution to journalConference articlepeer-review

24 Citations (Scopus)


Highly resistive (CoFeB)-(SiO2) films for magnetic core of 1 GHz driving inductor were deposited on glass substrates by synchronous dual-rf magnetron sputtering. Permeability characteristics in the range of a few GHz were investigated. The thickness effect on the reciprocal of the loss factors of tan δ (μr′/μr″) were investigated at 1 GHz. The film exhibited the maximum value of μr′/μr″ of 5.7 for film thickness d = 0.1 μm, with relative permeability of 120-150 and resonance frequency fr = 1.6-1.9 GHz. The result shows good potential for magnetic core of 1 GHz driving inductor.

Original languageEnglish
Pages (from-to)2258-2260
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number4 I
Publication statusPublished - 2001 Jul
Event8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States
Duration: 2001 Jan 72001 Jan 11


  • (CoFeB)-(SiO) films
  • GHz range
  • High resistivity
  • Low loss factor
  • Magnetic core
  • Permeability

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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