Thick photoresist original master: A new tool for fabrication of polymeric optical waveguides with large core by hot embossing

Hirotaka Mizuno, Okihiro Sugihara, Toshikuni Kaino, Yuka Ohe, Naomichi Okamoto, Masahito Hoshino

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

A simple and low-cost fabrication method of polymeric optical waveguides with large core sizes for plastic optical fibers is presented. The waveguides are fabricated by hot embossing with a rectangular ridge ultraviolet (UV)-cured epoxy resin stamper. The stamper is fabricated by replication of a rectangular groove mold that is made from silicone rubber replicated from a rectangular ridge original master made from thick photoresist (SU-8). A rectangular ridge shape of the original photoresist master of 1 mm size was realized by using a flattening process, which involves hot embossing before the exposure process and using a UV-cut filter during the exposure process.

Original languageEnglish
Pages (from-to)513-517
Number of pages5
JournalJournal of Nonlinear Optical Physics and Materials
Volume13
Issue number3-4
DOIs
Publication statusPublished - 2004 Dec

Keywords

  • Hot embossing
  • Polymeric optical waveguide
  • Thick photoresist

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Physics and Astronomy (miscellaneous)

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