Abstract
Non-stoichiometric titanium carbide (TiCx) plates were prepared by the chemical vapour deposition of TiCl4CCl4H2 system. The relationship between deposition conditions and the composition ratio x was established experimentally and examined through thermodynamic calculations. The composition ratio x decreased with increasing deposition temperature and source gas ratio [ CCl4] [TiCl4 + CC14], agreeing well with the thermodynamic predictions. The experimentally obtained values of x were slightly smaller than the calculated values. This difference was explained by a kinetic reason.
Original language | English |
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Pages (from-to) | 231-236 |
Number of pages | 6 |
Journal | Journal of the Less-Common Metals |
Volume | 159 |
Issue number | C |
DOIs | |
Publication status | Published - 1990 Apr 1 |
Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)