TY - JOUR
T1 - Thermal stability of Pt bottom electrodes for ferroelectric capacitors
AU - Matsui, Yuichi
AU - Hiratani, Masahiko
AU - Kumagai, Yukihiro
AU - Miura, Hideo
AU - Fujisaki, Yoshihisa
PY - 1998
Y1 - 1998
N2 - The stress of Pt films deposited at various temperatures and its correlation with the formation of hillocks during heat treatment were investigated. The residual stress changes from compressive to tensile as the deposition temperature increases. The compressive residual stress of a Pt film deposited at room temperature is initially relaxed by the shrinkage of the film thickness and then by hillock formation at a certain maximum compressive stress when the Pt film is heat-treated. On the other hand, Pt films deposited at higher temperatures (up to 500 °C) have a high tensile residual stress. The Pt film maintains its smooth surface and no hillocks appear during the heat treatment at 500 °C when the residual stress is tensile, since the threshold temperature at which hillocks form increases.
AB - The stress of Pt films deposited at various temperatures and its correlation with the formation of hillocks during heat treatment were investigated. The residual stress changes from compressive to tensile as the deposition temperature increases. The compressive residual stress of a Pt film deposited at room temperature is initially relaxed by the shrinkage of the film thickness and then by hillock formation at a certain maximum compressive stress when the Pt film is heat-treated. On the other hand, Pt films deposited at higher temperatures (up to 500 °C) have a high tensile residual stress. The Pt film maintains its smooth surface and no hillocks appear during the heat treatment at 500 °C when the residual stress is tensile, since the threshold temperature at which hillocks form increases.
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U2 - 10.1143/jjap.37.l465
DO - 10.1143/jjap.37.l465
M3 - Article
AN - SCOPUS:0032045495
VL - 37
SP - L465-L467
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 4 B
ER -