Abstract
With the aim of preparing nano-scale pattern for micro-machines and nano-devices, fabrication and imprint ability of Pd39Cu 29Ni13P19 glassy alloy thin film were investigated. By using a magnetron sputtering method, the Pd-based glassy alloy thin film of 1 μm in thickness was successfully fabricated. The Pd-based glassy alloy thin film shows large supercooled liquid region, long incubation time to crystallization, high hardness and very smooth surface, which are suitable for nano-imprint processing. Nano-imprint ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The imprinted hole array pattern precisely corresponded to the periodic dot pattern of the mold. These results suggest that the Pd-based glassy alloy thin film has high potential for application to the nano-imprinting materials for micro-machines and nano-devices.
Original language | English |
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Pages (from-to) | 1969-1972 |
Number of pages | 4 |
Journal | Intermetallics |
Volume | 18 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2010 Oct 1 |
Keywords
- B. Glasses, metallic
- B. Surface properties
- B. Thermal properties
- B. Thermal stability
- C. Thin films
ASJC Scopus subject areas
- Chemistry(all)
- Mechanics of Materials
- Mechanical Engineering
- Metals and Alloys
- Materials Chemistry