Thermal stability, mechanical properties and nano-imprint ability of Pd-Cu-Ni-P glassy alloy thin film

Kana Takenaka, Nozomu Togashi, Nobuyuki Nishiyama, Akihisa Inoue

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

With the aim of preparing nano-scale pattern for micro-machines and nano-devices, fabrication and imprint ability of Pd39Cu 29Ni13P19 glassy alloy thin film were investigated. By using a magnetron sputtering method, the Pd-based glassy alloy thin film of 1 μm in thickness was successfully fabricated. The Pd-based glassy alloy thin film shows large supercooled liquid region, long incubation time to crystallization, high hardness and very smooth surface, which are suitable for nano-imprint processing. Nano-imprint ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The imprinted hole array pattern precisely corresponded to the periodic dot pattern of the mold. These results suggest that the Pd-based glassy alloy thin film has high potential for application to the nano-imprinting materials for micro-machines and nano-devices.

Original languageEnglish
Pages (from-to)1969-1972
Number of pages4
JournalIntermetallics
Volume18
Issue number10
DOIs
Publication statusPublished - 2010 Oct 1

Keywords

  • B. Glasses, metallic
  • B. Surface properties
  • B. Thermal properties
  • B. Thermal stability
  • C. Thin films

ASJC Scopus subject areas

  • Chemistry(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

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