TY - JOUR
T1 - Thermal stability, mechanical properties and nano-imprint ability of Pd-Cu-Ni-P glassy alloy thin film
AU - Takenaka, Kana
AU - Togashi, Nozomu
AU - Nishiyama, Nobuyuki
AU - Inoue, Akihisa
N1 - Funding Information:
Financial supported by “ New Energy and Industrial Technology Development Organization ” (NEDO) under “Technological Development of Innovative Components Based on Enhanced Functionality Metallic Glass” project is acknowledged.
PY - 2010/10
Y1 - 2010/10
N2 - With the aim of preparing nano-scale pattern for micro-machines and nano-devices, fabrication and imprint ability of Pd39Cu 29Ni13P19 glassy alloy thin film were investigated. By using a magnetron sputtering method, the Pd-based glassy alloy thin film of 1 μm in thickness was successfully fabricated. The Pd-based glassy alloy thin film shows large supercooled liquid region, long incubation time to crystallization, high hardness and very smooth surface, which are suitable for nano-imprint processing. Nano-imprint ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The imprinted hole array pattern precisely corresponded to the periodic dot pattern of the mold. These results suggest that the Pd-based glassy alloy thin film has high potential for application to the nano-imprinting materials for micro-machines and nano-devices.
AB - With the aim of preparing nano-scale pattern for micro-machines and nano-devices, fabrication and imprint ability of Pd39Cu 29Ni13P19 glassy alloy thin film were investigated. By using a magnetron sputtering method, the Pd-based glassy alloy thin film of 1 μm in thickness was successfully fabricated. The Pd-based glassy alloy thin film shows large supercooled liquid region, long incubation time to crystallization, high hardness and very smooth surface, which are suitable for nano-imprint processing. Nano-imprint ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The imprinted hole array pattern precisely corresponded to the periodic dot pattern of the mold. These results suggest that the Pd-based glassy alloy thin film has high potential for application to the nano-imprinting materials for micro-machines and nano-devices.
KW - B. Glasses, metallic
KW - B. Surface properties
KW - B. Thermal properties
KW - B. Thermal stability
KW - C. Thin films
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U2 - 10.1016/j.intermet.2010.02.045
DO - 10.1016/j.intermet.2010.02.045
M3 - Article
AN - SCOPUS:77955556972
VL - 18
SP - 1969
EP - 1972
JO - Intermetallics
JF - Intermetallics
SN - 0966-9795
IS - 10
ER -