Thermal stability, mechanical properties and nano-imprint ability of Pd-Cu-Ni-P glassy alloy thin film

Kana Takenaka; Nozomu Togashi; Nobuyuki Nishiyama; Akihisa Inoue

doi:10.1016/j.intermet.2010.02.045

Thermal stability, mechanical properties and nano-imprint ability of Pd-Cu-Ni-P glassy alloy thin film

Kana Takenaka, Nozomu Togashi, Nobuyuki Nishiyama, Akihisa Inoue

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

With the aim of preparing nano-scale pattern for micro-machines and nano-devices, fabrication and imprint ability of Pd₃₉Cu ₂₉Ni₁₃P₁₉ glassy alloy thin film were investigated. By using a magnetron sputtering method, the Pd-based glassy alloy thin film of 1 μm in thickness was successfully fabricated. The Pd-based glassy alloy thin film shows large supercooled liquid region, long incubation time to crystallization, high hardness and very smooth surface, which are suitable for nano-imprint processing. Nano-imprint ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The imprinted hole array pattern precisely corresponded to the periodic dot pattern of the mold. These results suggest that the Pd-based glassy alloy thin film has high potential for application to the nano-imprinting materials for micro-machines and nano-devices.

Original language	English
Pages (from-to)	1969-1972
Number of pages	4
Journal	Intermetallics
Volume	18
Issue number	10
DOIs	https://doi.org/10.1016/j.intermet.2010.02.045
Publication status	Published - 2010 Oct 1

Keywords

B. Glasses, metallic
B. Surface properties
B. Thermal properties
B. Thermal stability
C. Thin films

ASJC Scopus subject areas

Chemistry(all)
Mechanics of Materials
Mechanical Engineering
Metals and Alloys
Materials Chemistry

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title = "Thermal stability, mechanical properties and nano-imprint ability of Pd-Cu-Ni-P glassy alloy thin film",

abstract = "With the aim of preparing nano-scale pattern for micro-machines and nano-devices, fabrication and imprint ability of Pd39Cu 29Ni13P19 glassy alloy thin film were investigated. By using a magnetron sputtering method, the Pd-based glassy alloy thin film of 1 μm in thickness was successfully fabricated. The Pd-based glassy alloy thin film shows large supercooled liquid region, long incubation time to crystallization, high hardness and very smooth surface, which are suitable for nano-imprint processing. Nano-imprint ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The imprinted hole array pattern precisely corresponded to the periodic dot pattern of the mold. These results suggest that the Pd-based glassy alloy thin film has high potential for application to the nano-imprinting materials for micro-machines and nano-devices.",

keywords = "B. Glasses, metallic, B. Surface properties, B. Thermal properties, B. Thermal stability, C. Thin films",

author = "Kana Takenaka and Nozomu Togashi and Nobuyuki Nishiyama and Akihisa Inoue",

year = "2010",

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AU - Takenaka, Kana

AU - Togashi, Nozomu

AU - Nishiyama, Nobuyuki

AU - Inoue, Akihisa

PY - 2010/10/1

Y1 - 2010/10/1

N2 - With the aim of preparing nano-scale pattern for micro-machines and nano-devices, fabrication and imprint ability of Pd39Cu 29Ni13P19 glassy alloy thin film were investigated. By using a magnetron sputtering method, the Pd-based glassy alloy thin film of 1 μm in thickness was successfully fabricated. The Pd-based glassy alloy thin film shows large supercooled liquid region, long incubation time to crystallization, high hardness and very smooth surface, which are suitable for nano-imprint processing. Nano-imprint ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The imprinted hole array pattern precisely corresponded to the periodic dot pattern of the mold. These results suggest that the Pd-based glassy alloy thin film has high potential for application to the nano-imprinting materials for micro-machines and nano-devices.

AB - With the aim of preparing nano-scale pattern for micro-machines and nano-devices, fabrication and imprint ability of Pd39Cu 29Ni13P19 glassy alloy thin film were investigated. By using a magnetron sputtering method, the Pd-based glassy alloy thin film of 1 μm in thickness was successfully fabricated. The Pd-based glassy alloy thin film shows large supercooled liquid region, long incubation time to crystallization, high hardness and very smooth surface, which are suitable for nano-imprint processing. Nano-imprint ability of the obtained film is demonstrated by using dot array mold with a dot diameter of 30 nm. The imprinted hole array pattern precisely corresponded to the periodic dot pattern of the mold. These results suggest that the Pd-based glassy alloy thin film has high potential for application to the nano-imprinting materials for micro-machines and nano-devices.

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KW - B. Surface properties

KW - B. Thermal properties

KW - B. Thermal stability

KW - C. Thin films

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