Thermal stability evaluation of diamond-like nanocomposite coatings

Won Jae Yang, Yong Ho Choa, Tohru Sekino, Kwang Bo Shim, Koichi Niihara, Keun Ho Auh

Research output: Contribution to journalArticlepeer-review

68 Citations (Scopus)

Abstract

Diamond-like nanocomposite (DLN) is a class of modified diamond-like carbon (DLC) coatings. The DLN films consist of amorphous networks of carbon and silicon, which are made by incorporating the Si-O structures into the DLC films. The thermal stability of DLN films was investigated by annealing the films deposited on Si (1 0 0) substrates by plasma enhanced chemical vapor deposition. The films were heated in ambient air for 1 h at the annealing temperatures ranging from 200 to 600 °C. The mechanical properties as well as structural modification of the annealed films were investigated as a function of annealing temperature. The chemical structure, composition, thickness and hardness values of the annealed films were measured by Raman spectrometer, electron probe micro analyzer, scanning electron microscope and ultra micro-indentation system, respectively. The comparison between DLN and DLC films on their thermal stability was made in order to understand the characteristics of DLN films. It is assumed that the DLN films show a good thermal stability for the protective coating applications at high temperature environment in air atmosphere in comparison with DLC films.

Original languageEnglish
Pages (from-to)49-54
Number of pages6
JournalThin Solid Films
Volume434
Issue number1-2
DOIs
Publication statusPublished - 2003 Jun 23

Keywords

  • Diamond-like nanocomposite
  • Hardness
  • Raman scattering
  • Thermal stability

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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