Thermal stability evaluation of diamond-like nanocomposite coatings

Won Jae Yang; Yong Ho Choa; Tohru Sekino; Kwang Bo Shim; Koichi Niihara; Keun Ho Auh

doi:10.1016/S0040-6090(03)00466-8

Thermal stability evaluation of diamond-like nanocomposite coatings

Won Jae Yang, Yong Ho Choa, Tohru Sekino, Kwang Bo Shim, Koichi Niihara, Keun Ho Auh

Institute of Multidisciplinary Research for Advanced Materials (IMRAM)

Research output: Contribution to journal › Article › peer-review

76 Citations (Scopus)

Abstract

Diamond-like nanocomposite (DLN) is a class of modified diamond-like carbon (DLC) coatings. The DLN films consist of amorphous networks of carbon and silicon, which are made by incorporating the Si-O structures into the DLC films. The thermal stability of DLN films was investigated by annealing the films deposited on Si (1 0 0) substrates by plasma enhanced chemical vapor deposition. The films were heated in ambient air for 1 h at the annealing temperatures ranging from 200 to 600 °C. The mechanical properties as well as structural modification of the annealed films were investigated as a function of annealing temperature. The chemical structure, composition, thickness and hardness values of the annealed films were measured by Raman spectrometer, electron probe micro analyzer, scanning electron microscope and ultra micro-indentation system, respectively. The comparison between DLN and DLC films on their thermal stability was made in order to understand the characteristics of DLN films. It is assumed that the DLN films show a good thermal stability for the protective coating applications at high temperature environment in air atmosphere in comparison with DLC films.

Original language	English
Pages (from-to)	49-54
Number of pages	6
Journal	Thin Solid Films
Volume	434
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(03)00466-8
Publication status	Published - 2003 Jun 23

Keywords

Diamond-like nanocomposite
Hardness
Raman scattering
Thermal stability

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/S0040-6090(03)00466-8

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title = "Thermal stability evaluation of diamond-like nanocomposite coatings",

abstract = "Diamond-like nanocomposite (DLN) is a class of modified diamond-like carbon (DLC) coatings. The DLN films consist of amorphous networks of carbon and silicon, which are made by incorporating the Si-O structures into the DLC films. The thermal stability of DLN films was investigated by annealing the films deposited on Si (1 0 0) substrates by plasma enhanced chemical vapor deposition. The films were heated in ambient air for 1 h at the annealing temperatures ranging from 200 to 600 °C. The mechanical properties as well as structural modification of the annealed films were investigated as a function of annealing temperature. The chemical structure, composition, thickness and hardness values of the annealed films were measured by Raman spectrometer, electron probe micro analyzer, scanning electron microscope and ultra micro-indentation system, respectively. The comparison between DLN and DLC films on their thermal stability was made in order to understand the characteristics of DLN films. It is assumed that the DLN films show a good thermal stability for the protective coating applications at high temperature environment in air atmosphere in comparison with DLC films.",

keywords = "Diamond-like nanocomposite, Hardness, Raman scattering, Thermal stability",

author = "Yang, {Won Jae} and Choa, {Yong Ho} and Tohru Sekino and Shim, {Kwang Bo} and Koichi Niihara and Auh, {Keun Ho}",

note = "Funding Information: This study was financially supported by the Korean Science and Engineering Foundation (KOSEF) through the Ceramic Processing Research Center (CPRC) and also by the Core University Program between Hanyang University, Korea and Osaka University, Japan.",

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doi = "10.1016/S0040-6090(03)00466-8",

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AU - Yang, Won Jae

AU - Choa, Yong Ho

AU - Sekino, Tohru

AU - Shim, Kwang Bo

AU - Niihara, Koichi

AU - Auh, Keun Ho

N1 - Funding Information: This study was financially supported by the Korean Science and Engineering Foundation (KOSEF) through the Ceramic Processing Research Center (CPRC) and also by the Core University Program between Hanyang University, Korea and Osaka University, Japan.

PY - 2003/6/23

Y1 - 2003/6/23

N2 - Diamond-like nanocomposite (DLN) is a class of modified diamond-like carbon (DLC) coatings. The DLN films consist of amorphous networks of carbon and silicon, which are made by incorporating the Si-O structures into the DLC films. The thermal stability of DLN films was investigated by annealing the films deposited on Si (1 0 0) substrates by plasma enhanced chemical vapor deposition. The films were heated in ambient air for 1 h at the annealing temperatures ranging from 200 to 600 °C. The mechanical properties as well as structural modification of the annealed films were investigated as a function of annealing temperature. The chemical structure, composition, thickness and hardness values of the annealed films were measured by Raman spectrometer, electron probe micro analyzer, scanning electron microscope and ultra micro-indentation system, respectively. The comparison between DLN and DLC films on their thermal stability was made in order to understand the characteristics of DLN films. It is assumed that the DLN films show a good thermal stability for the protective coating applications at high temperature environment in air atmosphere in comparison with DLC films.

AB - Diamond-like nanocomposite (DLN) is a class of modified diamond-like carbon (DLC) coatings. The DLN films consist of amorphous networks of carbon and silicon, which are made by incorporating the Si-O structures into the DLC films. The thermal stability of DLN films was investigated by annealing the films deposited on Si (1 0 0) substrates by plasma enhanced chemical vapor deposition. The films were heated in ambient air for 1 h at the annealing temperatures ranging from 200 to 600 °C. The mechanical properties as well as structural modification of the annealed films were investigated as a function of annealing temperature. The chemical structure, composition, thickness and hardness values of the annealed films were measured by Raman spectrometer, electron probe micro analyzer, scanning electron microscope and ultra micro-indentation system, respectively. The comparison between DLN and DLC films on their thermal stability was made in order to understand the characteristics of DLN films. It is assumed that the DLN films show a good thermal stability for the protective coating applications at high temperature environment in air atmosphere in comparison with DLC films.

KW - Diamond-like nanocomposite

KW - Hardness

KW - Raman scattering

KW - Thermal stability

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Thermal stability evaluation of diamond-like nanocomposite coatings

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Keywords

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