Thermal resistance change of liquid carbon dioxide based on narrow space effect in micro chamber

Masaya Toda, Tomoyuki Yamagami, Naoki Inomata, Takashi Fujii, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The micro fluidic chamber with narrow gap for high pressurized fluid has been designed and fabricated. The carbon dioxide (CO2) is injected into the narrow gap spaces of 0.5 μm and 1.6 μm. Their thermal resistance changes have been measured by changing the pressure and temperature. Hence, related to the effect of narrow space the critical pressure of supercritical CO2 is shifted to lower values. When the gap distance is shorter, the pressure of the minimum total-thermal-resistance (Rtotal) becomes lower. This 'narrow space effect' is enhanced by the shorter gap distance. Additionally, the change of thermal resistance related to pressure change is more responsive for narrower spacing. The smaller spacing seems to make more sensitive responsibility of the inserted fluid property. These results indicate that the filled fluid in a micro-chamber can be applied for the applications of sensing and switching devices using variable physical properties of the packaged fluid in narrow spaces.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1296-1299
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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